Phase Adjustment Circuit Admittance Control for Capacitance Measurement

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Solution Overview

Problem

Existing electrostatic capacitance measuring devices face challenges in accurately adjusting voltage signals due to temperature fluctuations, leading to inconsistencies in measurement accuracy.

Innovation Solution

A measuring device comprising a base board, sensor electrode, temperature sensor, radio frequency oscillator, C/V conversion circuit, and phase adjustment circuit, which acquires and adjusts parameters to stabilize voltage signals by using pre-stored and corrected parameter groups based on temperature data, ensuring accurate electrostatic capacitance measurement.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If temperature compensation parameters are pre-stored for multiple temperatures, then measurement accuracy is improved, but device complexity increases

Engineering Contradiction:
Improveelectrostatic capacitance measurement accuracyVSAvoidparameter storage and management complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The patent pre-stores correction parameter groups for multiple temperatures in advance. During measurement, the system only needs to read the appropriate pre-prepared parameter group based on the current temperature, avoiding complex real-time calculations and simplifying the measurement process while maintaining high accuracy.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent uses temperature as a key parameter to select different correction parameter groups. By changing the temperature parameter, the system automatically switches to the corresponding pre-stored correction parameters, enabling adaptive compensation without complex control logic.

Inventive Principle:
Principle #35Parameter changes

2Stability of the object's composition

If correction parameter groups are created for multiple temperatures, then stability under temperature variations is improved, but data processing complexity increases

Engineering Contradiction:
Improvevoltage signal stabilityVSAvoidparameter correction and management complexity
Core Design Contradiction:
Stability of the object's compositionVSDevice complexity

Solution Approach 1:

Correction parameter groups for multiple temperatures are prepared in advance through preliminary calibration. This allows the system to quickly switch between pre-validated parameter sets based on temperature, ensuring signal stability without requiring complex real-time parameter generation or management.

Inventive Principle:
Principle #10Preliminary action

3Reliability

If admittance of phase adjustment circuit is adjusted based on temperature, then measurement reliability is improved, but adjustment complexity increases

Engineering Contradiction:
Improvemeasurement reliabilityVSAvoidparameter adjustment complexity
Core Design Contradiction:
ReliabilityVSEase of operation

Solution Approach 1:

The system automatically selects and applies the appropriate correction parameter group based on the detected temperature, without requiring manual intervention. The temperature sensor continuously monitors and triggers automatic parameter switching, making the adjustment process self-service and eliminating manual complexity while maintaining high reliability.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The system uses temperature sensor feedback to automatically adjust the correction parameters. The temperature detection result feeds back to the parameter selection logic, which then applies the appropriate correction parameter group, creating a closed-loop system that maintains measurement reliability through automatic adaptation.

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively stabilizes voltage signals and enhances measurement accuracy by adjusting admittance of the phase adjustment circuit, accounting for temperature variations and environmental conditions, thereby improving the reliability of electrostatic capacitance measurements.

Implementation Method 1

a temperature sensor, provided on the base board

Methodology Applied
Scientific EffectTemperature sensing: Thermistor

Implementation Method 2

a C/V conversion circuit, which generates a voltage signal according to electrostatic capacitance formed by the sensor electrode

Methodology Applied
Scientific EffectCapacitance to voltage conversion: Capacitance

Implementation Method 3

a phase adjustment circuit, connected between the sensor electrode and the radio frequency oscillator

Methodology Applied
Scientific EffectAdmittance adjustment: Electrical Resistance

Data Source

PatentUS12196700B2Measuring method, measuring device, and measuring system
Publication Date: 2025.01.14 TOKYO ELECTRON LTD
  • US12196700B2 patent drawing
  • US12196700B2 patent drawing
  • US12196700B2 patent drawing

AI summary

A measuring method according to an exemplary embodiment includes acquiring a temperature by a temperature sensor at a first time, and acquiring a first parameter that sets an admittance of a phase adjustment circuit. The measuring method includes acquiring a second parameter corresponding to the temperature acquired at the first time. The second parameter is generated based on a second parameter group that is pre-stored. The measuring method includes acquiring a correction parameter group by correcting a second parameter group to correspond to the first parameter based on the first parameter and the second parameter.