Phase Analysis Screen Segmentation for Condition Comparison

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Solution Overview

Problem

In phase analysis using scanning electron microscopes, obtaining favorable results requires repeated adjustments of analysis conditions, necessitating re-performance of phase analysis under original conditions to confirm changes, which is inefficient and labor-intensive.

Innovation Solution

A phase analyzer system that includes a data acquisition unit, phase analysis unit, and display control unit, allowing for simultaneous display of phase analysis results before and after condition changes on separate screens, enabling easy comparison and reproduction of original results.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If phase analysis is repeated under different conditions to find appropriate conditions, then the quality of phase analysis results is improved, but the time and labor required increases significantly

Engineering Contradiction:
Improvequality of phase analysis resultsVSAvoidtime required for repeated analysis
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The display interface is segmented into multiple screens: a first screen that continuously displays results from original analysis conditions, and a second screen that displays results from changed analysis conditions. This segmentation allows users to compare different analysis results simultaneously without losing track of original results, thereby reducing the time needed for repeated analysis while maintaining result quality.

Inventive Principle:
Principle #1Segmentation

2Measurement precision

If phase analysis is repeated under different conditions to find appropriate conditions, then the quality of phase analysis results is improved, but the labor intensity increases

Engineering Contradiction:
Improvequality of phase analysis resultsVSAvoidlabor intensity
Core Design Contradiction:
Measurement precisionVSEase of operation

Solution Approach 1:

The display interface is segmented into multiple screens: a first screen that continuously displays results from original analysis conditions, and a second screen that displays results from changed analysis conditions. This segmentation allows users to compare different analysis results simultaneously without losing track of original results, thereby reducing the time needed for repeated analysis while maintaining result quality.

Inventive Principle:
Principle #1Segmentation

3Reliability

If original phase analysis results need to be confirmed after condition changes, then accuracy is maintained, but additional analysis time is required

Engineering Contradiction:
Improveaccuracy of phase analysis resultsVSAvoidadditional analysis time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The system performs preliminary action by continuously maintaining and displaying the original phase analysis results on the first screen even after analysis conditions are changed. This allows users to immediately compare new results with original results without needing to re-run or re-confirm the original analysis, thereby maintaining accuracy while eliminating additional analysis time.

Inventive Principle:
Principle #10Preliminary action

Data Source

PatentEP4174481B1Phase analyzer, sample analyzer, and analysis method
Publication Date: 2024.08.07 JEOL LTD
  • EP4174481B1 patent drawingFigure 1
  • EP4174481B1 patent drawingFigure 2~3
  • EP4174481B1 patent drawingFigure 4~5

AI summary

A phase analyzer includes: a data acquisition unit (802) that acquires spectrum imaging data in which a position on a sample (S) is associated with a spectrum of a signal from the sample (S); a phase analysis unit (806) that performs phase analysis based on the spectrum imaging data; a display control unit (808) that displays results of the phase analysis on a first screen (2); and a condition reception unit (804) that receives an operation for changing a condition for the phase analysis, when the condition reception unit (804) has received the operation for changing the condition, the phase analysis unit (806) performing phase analysis under the changed condition, the display control unit (808) displaying on a second screen (4) the results of the phase analysis performed under the changed condition and when a predetermined operation has been performed, the display control unit (808) reflecting on the first screen (2) the results of the phase analysis displayed on the second screen (4).