Phase-Selective Susceptor Lift for Sealed Substrate Transfer
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Solution Overview
Problem
In substrate processing apparatuses, frequent maintenance of the susceptor requires its removal from the processing chamber, which reduces throughput due to the need for opening the chamber to air, and existing mechanisms cannot efficiently transfer both the substrate and susceptor.
Innovation Solution
A substrate processing apparatus with a lift mechanism that rotates and moves the susceptor in phases, allowing for the selective transfer of the susceptor and substrate by alternately contacting different members of the susceptor with protrusions, enabling efficient transfer within a sealed environment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of repair
If the susceptor is removed from the processing chamber for maintenance, then the susceptor can be cleaned and maintained, but the processing chamber must be opened to air which reduces throughput
Solution Approach 1:
The susceptor is divided into a first member (base portion) and a second member (cover portion) that can be separated from each other. This segmentation allows the second member to be removed for maintenance while the first member remains in the processing chamber, enabling susceptor maintenance without opening the chamber and thus maintaining throughput.
Solution Approach 2:
The second member (cover portion) is extracted and removed from the processing chamber for maintenance while the first member (base portion) remains. This selective extraction allows maintenance to be performed on the removable second member without requiring chamber opening, thereby maintaining productivity.
2Productivity
If the substrate is placed on the susceptor inside the processing chamber, then the transfer process is efficient, but the existing lift mechanism cannot transfer the susceptor after substrate removal
Solution Approach 1:
The lift mechanism is designed with protrusions that can contact either the first member or the second member of the susceptor depending on the rotational phase. This multi-functionality allows the same lift mechanism to transfer both the substrate (when contacting second member) and the susceptor (when contacting first member), eliminating the need for separate transfer mechanisms and maintaining transfer efficiency while increasing versatility.
Solution Approach 2:
The susceptor is rotated to different phases to dynamically change which member (first or second) is contacted by the lift protrusions. This dynamic phase adjustment allows the lift mechanism to adaptively transfer different components (substrate or susceptor) using the same mechanism, improving both transfer efficiency and mechanism versatility.
3Ease of repair
If maintenance is performed frequently by removing substrate and susceptor, then the susceptor can be maintained, but the substrate must be re-placed outside the chamber which reduces productivity
Solution Approach 1:
By segmenting the susceptor into removable second member and stationary first member, maintenance can be performed on the second member while the first member and substrate remain in the processing chamber. This eliminates the need to remove and re-place the substrate for each maintenance operation, maintaining high productivity while enabling frequent susceptor maintenance.
Solution Approach 2:
Only the second member (cover portion) is extracted for maintenance while the first member (base portion) with the substrate remains in the processing chamber. This selective extraction allows maintenance to be performed without disturbing the substrate processing, thereby maintaining productivity while enabling frequent susceptor maintenance.
Data Source
AI summary
An apparatus of an embodiment includes: a processing-chamber; a susceptor capable of supporting a substrate, the susceptor including a first member having an opening in a central portion, and a second member covering the opening; a support configured to support and rotate the susceptor in the processing-chamber; and a lift disposed in the support, and capable of moving up and down at least one of the first member and the second member, wherein the support is capable of rotating the susceptor to have predefined phases with respect to the lift, and when the lift moves up, the lift is brought into contact with the first member if the susceptor is in a first phase, and the lift is brought into contact with the second member if the susceptor is in a second phase that is different from the first phase.