Thermo-Optic Phase Shifter Heater Layout for Higher Optical Power

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Solution Overview

Problem

Conventional thermo-optic phase shifters are limited by their ability to tolerate high optical powers.

Innovation Solution

A structure for a thermo-optic phase shifter is designed with a waveguide core and a heater that includes a heating element and extensions projecting from it, positioned laterally to enhance heat transfer and thermal isolation, allowing for improved power handling.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Power

If conventional phase shifter structures are used, then the device can perform phase modulation, but the power handling capability is limited

Engineering Contradiction:
Improvepower handling capabilityVSAvoidtolerance to high optical powers
Core Design Contradiction:
PowerVSReliability

Solution Approach 1:

The heater is segmented into a heating element and extensions that are laterally separated from the waveguide core. The heating element is positioned to overlap with the waveguide core for heat transfer, while the extensions project laterally to distribute heat and reduce thermal stress on the core, enabling higher power handling without compromising reliability

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The extensions act as intermediary structures between the heating element and the waveguide core. They provide a thermal pathway that distributes heat laterally, reducing direct thermal stress on the core while maintaining effective heat transfer for phase modulation, thus improving power tolerance

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The structure enables enhanced thermal tuning of light propagation with increased power handling capability, benefiting from materials like silicon nitride and improved thermal isolation features.

Implementation Method 1

A phase shifter may operate by a thermo-optic mechanism in which heat is transferred to the waveguide core, which is comprised of a material having a refractive index that varies with temperature

Methodology Applied
Scientific EffectThermo-optic effect:

Implementation Method 2

a heater that includes a heating element, a first extension that projects from the first heating element, and a second extension that projects from the heating element

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Data Source

PatentUS20260044027A1Structures for a thermo-optic phase shifter
Publication Date: 2026.02.12 GLOBALFOUNDRIES US INC
  • US20260044027A1 patent drawing
  • US20260044027A1 patent drawing
  • US20260044027A1 patent drawing

AI summary

Structures for a thermo-optic phase shifter and methods of forming such structures. The structure comprises a waveguide core, and a heater that includes a heating element, a first extension that projects from the first heating element, and a second extension that projects from the heating element. The heating element overlaps with a portion of the waveguide core, and the portion of the waveguide core is positioned laterally between the first extension and the second extension.