Thermo-Optic Phase Shifter Array Layout for Low Thermal Crosstalk
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Solution Overview
Problem
Existing thermo-optic phase shifters suffer from high thermal crosstalk due to heat dissipation between waveguides, leading to large chip size, increased complexity, and higher costs, which hinders high-density integration and miniaturization.
Innovation Solution
The waveguides are alternately arranged with different thermo-optic coefficients, where one waveguide section is integrated with a heater and has a lower thermo-optic coefficient than the other, reducing thermal sensitivity and allowing closer proximity without additional isolation features.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If waveguides are kept far enough from each other to reduce thermal crosstalk, then thermal crosstalk is reduced, but chip area increases and integration density decreases
Solution Approach 1:
The patent applies local quality by giving different thermo-optic coefficients to different waveguide sections. Specifically, even-positioned waveguide sections use a first material while odd-positioned sections use a second material, creating local property variations that enable differential thermal response and reduce thermal crosstalk without increasing spacing between waveguides.
Solution Approach 2:
The patent employs composite materials by combining two different materials with distinct thermo-optic coefficients in the waveguide structure. This composite approach allows the waveguides to have different thermal sensitivities, enabling thermal isolation through material properties rather than spatial separation.
2Object-affected harmful factors
If side trenches or undercuts are added around each waveguide for thermal isolation, then thermal crosstalk is reduced, but manufacturing complexity increases
Solution Approach 1:
Instead of adding complex structural features like side trenches, the patent achieves thermal isolation through local quality variations in material composition. By assigning different thermo-optic coefficients to adjacent waveguide sections, the patent eliminates the need for additional isolation structures and their associated manufacturing complexity.
3Object-affected harmful factors
If waveguides are kept far enough from each other to reduce thermal crosstalk, then thermal crosstalk is reduced, but integration density decreases
Solution Approach 1:
The patent uses composite materials with different thermo-optic coefficients to achieve thermal isolation, allowing waveguides to be placed in close proximity without significant thermal interference. This enables high integration density while maintaining low thermal crosstalk through material-based rather than space-based isolation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design achieves lower thermal crosstalk, enabling compact structures, facilitating high-density integration, and reducing manufacturing complexity and costs while maintaining effective thermal isolation.
Implementation Method 1
the first waveguide section is integrated with a heater
Implementation Method 2
a thermo-optic coefficient of the second waveguide section is smaller than that of the first waveguide section
Data Source
AI summary
Provided in the present invention is a thermo-optic phase shifter array, including at least one first waveguide and at least one second waveguide, where the first waveguide extends in a first direction, the second waveguide extends in a second direction, the first waveguides and the second waveguides are alternately arranged in a third direction, the first waveguide includes a first waveguide section, the second waveguide includes a second waveguide section, the first waveguide sections and the second waveguide sections are alternately arranged in the third direction, the first waveguide section is integrated with a heater, and a thermo-optic coefficient of the second waveguide section is smaller than that of the first waveguide sections. The thermo-optic phase shifter array provided by the present invention has lower thermal crosstalk, and has a compact structure, facilitating high-density integration. The present invention further provides an interferometer array and an optical phased array.