Phased Array Steering for Laser Beam Positioning
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Solution Overview
Problem
Current laser processing systems face limitations in throughput and accuracy due to thermal and dynamic loads on optical components, particularly when processing densely spaced patterns, as they rely on galvo-based or acousto-optic deflector systems that struggle with high repetition rates and high-powered laser beams.
Innovation Solution
The implementation of a multi-stage beam positioning system incorporating a low-bandwidth positioner, mid-bandwidth positioner, and high-bandwidth phased array steering using a phase modulator array, which enables ultrafast intra-pulse beam steering and focusing, overcoming the limitations of existing systems by achieving bandwidths exceeding 1 GHz and reducing thermal and dynamic inaccuracies.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If galvo-based positioning is used to cover the entire workpiece field, then the processing area is increased, but thermal heating of the large lens and galvo degrades accuracy
Solution Approach 1:
The patent divides the beam positioning task into multiple stages: a low-bandwidth positioner for coarse positioning, a mid-bandwidth positioner for intermediate positioning, and a high-bandwidth phased array stealer for fine positioning. This segmentation allows each stage to operate within its optimal performance range, preventing thermal overload while covering the entire workpiece area.
Solution Approach 2:
The patent replaces the traditional mechanical galvo system with a phased array beam steering system that uses electronic phase modulation to deflect the laser beam. This substitution eliminates the mechanical inertia and thermal heating issues associated with large galvo mirrors, enabling high-speed, high-precision beam positioning across the entire workpiece field.
2Manufacturing precision
If a small galvo field is used with a movable stage, then beam positioning accuracy is improved, but throughput is reduced due to frequent acceleration and deceleration
Solution Approach 1:
The patent implements a multi-bandwidth positioner system where each stage operates at its optimal speed range. The low-bandwidth positioner handles slow, large-range movements, while the high-bandwidth phased array stealer handles fast, small-range adjustments. This dynamic allocation of positioning tasks eliminates the need for frequent acceleration and deceleration cycles, maintaining high throughput while achieving high precision.
Solution Approach 2:
The patent introduces mid-bandwidth positioners as intermediary stages between the low-bandwidth positioner and the high-bandwidth phased array stealer. These intermediaries buffer the transitions between different positioning stages, smoothing out acceleration and deceleration cycles and preventing throughput degradation while maintaining positioning accuracy.
3Productivity
If high acceleration is used to reduce turnaround time, then throughput is improved, but thermal heating of the galvo degrades accuracy
Solution Approach 1:
The patent replaces the thermal-prone mechanical galvo system with a phased array beam steering system that uses electronic phase control. This substitution allows for high acceleration and rapid beam repositioning without the thermal heating that degrades accuracy in mechanical systems, thereby maintaining both high throughput and high precision.
Solution Approach 2:
The patent changes the operating parameters of the beam positioning system by using multiple positioners with different bandwidths. The high-bandwidth phased array stealer can operate at very high speeds and accelerations because it uses electronic phase modulation rather than mechanical movement, fundamentally changing the speed and acceleration parameters achievable without thermal degradation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly enhances processing throughput and accuracy by allowing high-speed, high-precision laser micromachining with minimized inaccuracy and quality degradation, enabling the processing of densely spaced features with improved thermal and dynamic stability.
Implementation Method 1
a high-bandwidth positioner stage including a phase modulator array configured for phased array steering of the laser beam relative to the workpiece
Data Source
AI summary
A laser beam positioning system of a laser-based specimen processing system produces at beam positioner stage, from a fully fiber-coupled optics phased array laser beam steering system, a steered laser input beam. System directs beam through one or more other beam positioner stages to form a processing laser beam that processes target features of a workpiece mounted on a support.