Phased Array Transducer Wafer-Scale Layout for Batch Manufacturing

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Solution Overview

Problem

Conventional phased array transducer manufacturing is limited by the need for individual handling and assembly, making batch processing difficult due to design constraints like wrap-around electrodes, resulting in small production lots and inconsistent results across multiple tool sets.

Innovation Solution

The use of wafer scale manufacturing to produce a grid of phased array transducers with ground contact traces on a piezoelectric layer, allowing for additive manufacturing and electrical trace routing on a carrier block to enable electrical isolation and connection between transducer elements, eliminating the need for adhesive layers and facilitating high-volume, low-cost production.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If wrap-around electrodes are used on piezoelectric layers, then ground connections are achieved, but manufacturing is limited to individual processing and batch production is difficult

Engineering Contradiction:
Improveground connectionVSAvoidbatch processing
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent divides the ground connection structure into discrete ground contact traces on the piezoelectric layer that can be individually addressed and connected to separate ground pads on the carrier block. This segmentation allows each transducer element to have its own ground path, enabling batch processing while maintaining reliable ground connections for each element.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent transitions from wrap-around electrodes that require lateral routing around the piezoelectric layer edges to a vertical/direct connection architecture where ground contact traces extend from the piezoelectric layer surface directly to the carrier block. This dimensional change eliminates the wrap-around constraint and enables systematic batch fabrication.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Manufacturing precision

If individual handling and assembly is used for each transducer component, then precise assembly is achieved, but production capacity is limited and costs increase

Engineering Contradiction:
Improveassembly precisionVSAvoidproduction capacity
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The patent merges multiple transducer elements onto a single carrier block in a grid array configuration. Multiple piezoelectric layers with their respective ground contact traces are assembled together on the same carrier, allowing simultaneous processing and testing of many elements. This merging dramatically increases production capacity while maintaining assembly precision through the carrier's structural guidance.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The carrier block serves multiple functions: it provides mechanical support, electrical grounding through ground pads, acoustic backing, and a platform for batch assembly of multiple transducer elements. This multi-functionality eliminates the need for separate handling and assembly fixtures for each element, thereby increasing productivity while maintaining precision.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Adaptability or versatility

If small production lots are used with multiple tool sets, then design constraints are met, but consistency across tools becomes difficult to maintain

Engineering Contradiction:
Improvedesign constraint complianceVSAvoidconsistency across tools
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The carrier block is designed as a universal platform that can accommodate and process multiple transducer elements simultaneously using the same tool set. This universal carrier design eliminates the need for multiple specialized tool sets, ensuring consistent processing conditions and results across all elements while still meeting specific design constraints through configurable trace patterns and element layouts.

Inventive Principle:
Principle #6Universality (Multi-functionality)

4Reliability

If 2×N grid configuration is used with wrap-around electrodes, then ground connections are achieved, but array size is limited

Engineering Contradiction:
Improveground connectionVSAvoidarray size
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The patent segments the ground connection into multiple independent ground contact traces that can be distributed across the entire piezoelectric layer surface. This segmentation allows ground connections to be made at multiple locations rather than requiring wrap-around paths, enabling expansion to larger M×N grid configurations beyond the limited 2×N arrangement.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent changes from lateral wrap-around ground paths to vertical/direct ground contact traces that extend from the piezoelectric layer to the carrier block. This dimensional change frees the design from the 2×N grid constraint, allowing arbitrary M×N array configurations where ground connections are made directly beneath each element rather than around the perimeter.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method enables the bulk manufacture of phased array transducers with enhanced control over dimensions and reduced costs, allowing for larger arrays and increased production capacity while maintaining acoustic performance.

Implementation Method 1

individual layers of a piezoelectric material... for medical transducers operating between 1 to 20 MHz

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

one or more acoustic matching and/or de-matching materials... plurality of acoustic matching layers is disposed on the first side of the piezoelectric layer

Methodology Applied
Scientific EffectAcoustic impedance matching: Acoustics

Implementation Method 3

acoustic backing structure disposed on the second side of the piezoelectric layer, where the acoustic backing structure is operatively coupled to the plurality of transducer elements

Methodology Applied
Scientific EffectAcoustic absorption: Acoustic Absorption

Data Source

PatentUS11806191B2Phased array transducers and wafer scale manufacturing for making the same
Publication Date: 2023.11.07 GE PRECISION HEALTHCARE LLC
  • US11806191B2 patent drawing
  • US11806191B2 patent drawing
  • US11806191B2 patent drawing

AI summary

A grid of phased array transducers includes a piezoelectric layer and a plurality of ground contact traces. The piezoelectric layer includes a first side and a second side. The plurality of ground contact traces is disposed on the first side of the piezoelectric layer along an elevational direction, where each ground contact trace of the plurality of ground contact traces extends along an azimuthal direction. Further, each phased array transducer of the grid of phased array transducers is disposed between an adjacently disposed pair of ground contact traces of the plurality of ground contact traces. Moreover, each phased array transducer includes at least a portion of at least one ground contact trace of a corresponding pair of ground contact traces, and where each phased array transducer includes a plurality of transducer elements.