Photo Spinner Recovery Cup Venting to Prevent Duct Clogging
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Solution Overview
Problem
In semiconductor manufacturing, high-viscosity processing liquids can cause fumes to build up in recovery cups and ducts, leading to pipe clogging during the substrate processing process.
Innovation Solution
A substrate processing apparatus with a recovery cup and air injection unit that surrounds the substrate support unit, using cleaning liquid and air to eliminate fumes by circulating and discharging them through a controlled discharge port, preventing buildup and clogging.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If high-viscosity processing liquid is used, then processing effectiveness is improved, but fumes build up in recovery cup and duct causing pipe clogging
Solution Approach 1:
The patent extracts the harmful fumes from the recovery cup environment by introducing an air injection unit that actively removes fumes through a duct system, separating the harmful byproducts from the processing environment while maintaining the benefits of high-viscosity liquid processing
Solution Approach 2:
The patent introduces air as an intermediary substance that interacts with the fumes in the recovery cup, facilitating their removal through the duct system. The air injection unit acts as a mediator between the processing liquid and the exhaust system, enabling effective fume management without compromising processing effectiveness
2Loss of substance
If recovery cup is used to recover processing liquid, then liquid recovery is improved, but fumes accumulate and cause clogging
Solution Approach 1:
The patent implements continuous fume removal through the air injection unit and duct system, ensuring that while processing liquid is continuously recovered in the cup, fumes are simultaneously and continuously extracted, preventing accumulation and maintaining uninterrupted operation
Solution Approach 2:
The harmful fumes are extracted from the recovery cup environment through the air injection and duct system, allowing the recovery cup to maintain its liquid recovery function without the adverse effect of fume buildup interfering with operation
3Ease of operation
If cleaning liquid is supplied to clean recovery cup, then cleaning effectiveness is improved, but volatile elements need to be discharged
Solution Approach 1:
The patent converts the potentially harmful volatile elements released during cleaning into a manageable exhaust stream by routing them through the existing duct system, transforming a cleaning byproduct into a controlled discharge that prevents contamination while maintaining cleaning effectiveness
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively prevents fume buildup in recovery cups and ducts, ensuring smooth operation and reducing maintenance by circulating and discharging volatile elements, thus maintaining system integrity and efficiency.
Implementation Method 1
an air injection unit configured to inject air to an internal space of the recovery cup
Implementation Method 2
as air is injected to the internal space of the recovery cup through the air injection unit, fumes can be eliminated by the cleaning liquid without being built up in the recovery cup
Implementation Method 3
volatile elements of the cleaning liquid may be discharged outwards through an inner exhaust port located in the recovery cup
Data Source
AI summary
Disclosure provides a substrate processing apparatus, an operating method thereof, and photo spinner equipment, the substrate processing apparatus being capable of preventing fumes of processing liquid from blocking a duct. The substrate processing apparatus supplying processing liquid to a substrate to perform processing includes a substrate support unit configured to support the substrate, a liquid supply unit configured to supply liquid to the substrate, and a liquid recovery unit configured to recover the liquid from the substrate. The liquid recovery unit includes a recovery cup formed to surround the substrate support unit and an air injection unit configured to inject air to an internal space of the recovery cup.