Photo Transistor Grating Light Concentration

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Solution Overview

Problem

Photo transistors struggle to function at reduced light levels or with thin layers, as incident light may not generate sufficient charge density to switch the transistor, particularly in CMOS SOI technology.

Innovation Solution

A diffraction pattern or grating is used to concentrate electromagnetic radiation in the light-sensitive area of the photo transistor, enhancing its sensitivity and allowing operation with thin layers by focusing optical energy and forming a conductive channel for charge switching.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Volume of moving object

If thin layers are used for light absorption in CMOS SOI technology, then device integration density is improved, but the incident light cannot generate sufficient charge density to switch the transistor

Engineering Contradiction:
Improvelayer thicknessVSAvoidcharge density generation
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

The patent introduces a grating structure that manipulates light in the lateral dimension (x-y plane) to concentrate optical energy vertically into the thin absorption layer. The grating period and geometry are designed to create diffraction orders that focus light at specific depths within the thin layer, enabling sufficient charge generation despite reduced thickness.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The patent modifies the optical parameters by introducing a periodic grating structure with specific period, depth, and duty cycle parameters. These geometric parameters are optimized to enhance light-matter interaction in the thin layer, creating localized fields that increase charge carrier generation efficiency without requiring thicker layers.

Inventive Principle:
Principle #35Parameter changes

2Area of moving object

If feature size is reduced to increase integration density, then device scaling is improved, but light concentration in the light-sensitive region becomes insufficient

Engineering Contradiction:
Improvefeature sizeVSAvoidlight concentration
Core Design Contradiction:
Area of moving objectVSIllumination intensity

Solution Approach 1:

The grating structure introduces asymmetric geometric features with different widths, depths, or orientations that create directional light concentration. This asymmetric design allows the grating to focus light preferentially into the reduced feature size region, compensating for the smaller area by increasing intensity through controlled diffraction and field enhancement.

Inventive Principle:
Principle #4Asymmetry

3Reliability

If a grating pattern is added to concentrate light, then light sensitivity is improved, but device structure complexity increases

Engineering Contradiction:
Improvelight sensitivityVSAvoidstructure complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The grating structure is designed to serve multiple functions: it concentrates light into the thin absorption layer, defines the active region geometry, and can be integrated with existing CMOS fabrication processes. By combining these functions into a single structure, the patent minimizes additional complexity while achieving enhanced light sensitivity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

4Ease of manufacture

If standard transistor structures are used without optimization, then manufacturing ease is maintained, but optical performance is insufficient

Engineering Contradiction:
Improveprocess standardizationVSAvoidoptical detection capability
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The patent segments the transistor structure by introducing a grating pattern that divides the light incident area into multiple diffraction zones. This segmentation allows standard transistor fabrication processes to be used while the grating segments the optical path to achieve enhanced light concentration, effectively decoupling manufacturing simplicity from optical performance.

Inventive Principle:
Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution enables photo transistors to operate effectively at reduced light levels and with decreasing feature sizes, maintaining sensitivity and efficiency without requiring process modifications, supporting the use of sub-wavelength gratings and optimizing charge enrichment in the depletion/inversion layer.

Implementation Method 1

a diffraction pattern or grating is used to concentrate electromagnetic radiation in the light-sensitive area of the photo transistor

Methodology Applied
Scientific EffectDiffraction: Diffraction

Data Source

PatentUS9219177B2Photo detector and integrated circuit
Publication Date: 2015.12.22 INTERNATIONAL BUSINESS MACHINE CORPORATION
  • US9219177B2 patent drawing
  • US9219177B2 patent drawing
  • US9219177B2 patent drawing

AI summary

The photo detector (100, 300, 500, 600, 700, 900) comprises a photo transistor (102, 902). The photo transistor has a light sensitive region (112, 910) for controlling the transistor action of the photo transistor. The photo detector further comprises a dielectric layer (118). The dielectric layer is in contact with the photo transistor. The photo detector further comprises a grating pattern (114, 604, 914, 1010) in contact with the dielectric layer. The grating layer and the dielectric layer are adapted for focusing electromagnetic radiation in the light sensitive region.