Photochemical Meniscus Deposition for Maskless Metal Patterning

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Solution Overview

Problem

Conventional methods for forming conductive paths and self-assembled monolayers are complex, time-consuming, and require additional steps like mask preparation, leading to high material and energy costs, and often result in contamination or specific substrate dependency.

Innovation Solution

A method and apparatus for conducting a photochemical reaction in a moving meniscus that allows for precise deposition of metallic or organic paths without a mask, using a small amount of chemical reagents and controlling the structure, thickness, and width of the deposited layer by adjusting the movement of the meniscus and light intensity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional lithography methods with masks are used to form conductive paths, then pattern precision can be achieved, but the process complexity and time consumption increase significantly due to mask preparation and multiple processing steps

Engineering Contradiction:
Improvepattern precisionVSAvoidprocess complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The invention extracts and removes the mask from the lithography process entirely. Instead of using a physical mask to define patterns, the patent uses direct photochemical deposition where light selectively reduces metal ions only in the illuminated areas, eliminating the need for mask preparation and application steps while maintaining pattern precision

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The invention replaces the mechanical mask system with a photochemical field-based system. Instead of physically blocking light with a mask, the patent uses controlled illumination to directly induce chemical reduction of metal ions, substituting a mechanical patterning approach with an optical-chemical approach that eliminates mask-related complexity

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Manufacturing precision

If conventional lithography methods are used to form conductive paths, then controlled deposition can be achieved, but material and energy costs increase due to multiple processing steps including etching and cleaning

Engineering Contradiction:
Improvedeposition controlVSAvoidenergy consumption
Core Design Contradiction:
Manufacturing precisionVSLoss of energy

Solution Approach 1:

The invention merges multiple separate processing steps (deposition, patterning, and formation of conductive paths) into a single photochemical deposition step. The light-induced reduction simultaneously achieves selective metal deposition and pattern formation in one operation, eliminating the need for separate etching and cleaning steps required by conventional lithography

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The invention performs the deposition action directly where needed through selective illumination, rather than depositing material everywhere and then removing unwanted portions through etching. The photochemical reduction occurs only in illuminated areas, performing the useful deposition action preliminarily and selectively before any removal steps would be needed

Inventive Principle:
Principle #10Preliminary action

3Productivity

If laser photolysis is used for gold deposition from metal-organic precursors, then rapid deposition can be achieved, but contamination with precursors and photolysis by-products occurs

Engineering Contradiction:
Improvedeposition speedVSAvoidcontamination
Core Design Contradiction:
ProductivityVSObject-generated harmful factors

Solution Approach 1:

The invention changes the chemical parameters of the deposition system by using inorganic metal salts (like AuCl3) instead of metal-organic precursors. This parameter change in the precursor chemistry allows for cleaner photolysis reactions that produce minimal contamination, while maintaining rapid deposition speeds through efficient photochemical reduction

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention creates a cleaner reaction environment by using inorganic precursors that undergo cleaner photoreduction reactions. The use of simple inorganic salt systems rather than complex organic-metal precursors creates a cleaner chemical environment that minimizes the formation of contaminating by-products during the photochemical deposition process

Inventive Principle:
Principle #39Inert atmosphere (Inert environment)

4Ease of manufacture

If inkjet printing methods are used to form paths, then direct deposition without masks is possible, but special substrate-specific inks are required

Engineering Contradiction:
Improveprocess simplicityVSAvoidsubstrate compatibility
Core Design Contradiction:
Ease of manufactureVSAdaptability or versatility

Solution Approach 1:

The invention creates a universal photochemical deposition system that can work with multiple substrate types using the same inorganic metal salt precursors and photochemical process. The method is not limited to substrate-specific inks but can deposit metal patterns on various substrates through a single versatile photochemical approach that works across different material platforms

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach significantly reduces material costs and streamlines the manufacturing process by enabling the production of homogeneous paths with desired characteristics without additional process steps, such as mask preparation, and allows for precise control over the deposition of materials like gold and silver.

Implementation Method 1

irradiating the object with ultraviolet rays, and depositing gold on the object to form gold plating when the ultraviolet rays cause a photochemical reaction in the solution

Methodology Applied
Scientific EffectPhotochemical reaction: Photopolymerisation

Data Source

PatentEP3720986B1Conducting a photochemical reaction in a moving meniscus
Publication Date: 2022.11.16 JAGIELLONIAN UNIVERSITY
  • EP3720986B1 patent drawingFigure 1
  • EP3720986B1 patent drawingFigure 2
  • EP3720986B1 patent drawingFigure 3a~3i

AI summary

An apparatus for conducting a photochemical reaction in a meniscus, the apparatus comprising: a cylinder(8) configured to spread a precursor solution in the meniscus over a substrate; a movement system (1) configured to effect movement of the cylinder(8)in relation to the substrate; a platform(12) configured to hold the substrate; a distance adjustment system configured to adjust the distance (2) of the cylinder from the substrate; a substrate inclination adjustment system configured to control a tilt of the cylinder (2) in relation to the substrate; and a holder(10) of a light source(11) configured to illuminate the meniscus.