Photocurable Composition Thermal Expansion Control
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The photocurable composition for imprint used in optical imprint techniques experiences thermal expansion during dry etching, leading to distortion of pattern line widths and accuracy issues in circuit pattern formation, and there is a need for improved filling properties to enhance productivity.
Innovation Solution
A photocurable composition comprising a polymerizable compound with 20% or more of a multifunctional (meth)acrylic monomer and a photopolymerization initiator, with a glass transition temperature of 90°C or more, to minimize thermal expansion and ensure excellent filling properties.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a conventional photocurable composition is used, then the optical imprint process can be performed, but thermal expansion occurs during dry etching causing pattern distortion and accuracy loss
Solution Approach 1:
The patent changes the chemical composition parameters of the photocurable composition by incorporating specific polymers with low thermal expansion coefficients and controlling the content of monomers and oligomers. This modifies the thermal properties of the cured resin to minimize thermal expansion during dry etching, thereby maintaining pattern accuracy
Solution Approach 2:
The patent creates a composite photocurable composition combining multiple components including polymers, monomers, and oligomers with specific properties. The composite structure leverages the low thermal expansion of certain polymers while maintaining the necessary curing and filling properties through the synergistic combination of components
2Object-affected harmful factors
If the photocurable composition has high viscosity, then thermal expansion is reduced, but filling properties into fine pattern concave portions deteriorate
Solution Approach 1:
The patent optimizes the viscosity parameter by controlling the molecular weight and content of oligomers, and by selecting appropriate monomers. The composition achieves a balanced viscosity that is low enough for good filling into fine patterns but high enough to minimize thermal expansion, resolving the contradiction between these two requirements
Solution Approach 2:
The patent creates local quality differences in the composition by using components with different molecular weights and flow characteristics. The composition has regions of varying viscosity that allow it to flow into fine patterns under pressure while maintaining overall low thermal expansion properties
3Productivity
If the photocurable composition has low viscosity, then filling properties are improved, but thermal expansion increases causing pattern distortion
Solution Approach 1:
The patent uses a composite formulation where low-viscosity components enable good filling properties while high-density, low thermal expansion polymers counterbalance the thermal expansion tendency. The composite achieves both good flow characteristics and thermal stability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The composition achieves reduced thermal expansion and distortion, enabling high accuracy in circuit pattern formation and improved filling properties for enhanced productivity in optical imprint methods.
Implementation Method 1
a photopolymerization initiator (B)... light is emitted to cure the resist
Data Source
AI summary
A photocurable composition for imprint at least has a polymerizable compound (A) and a photopolymerization initiator (B), in which the polymerizable compound (A) contains 20% by weight or more of a multifunctional (meth)acrylic monomer and the glass transition temperature of a photocured substance of the photocurable composition is 90° C. or more.