Photocurable Composition for Inkjet Planarization

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Solution Overview

Problem

Current Inkjet Adaptive Planarization (IAP) materials lack high glass transition temperature and improved dry etch performance, which are essential for forming planar cured layers suitable for subsequent processing steps in electronic circuit fabrication.

Innovation Solution

A photocurable composition comprising a polymerizable material with a multi-functional monomer of Formula (1), such as allyloxymethyl acrylate, in specific weight percentages, along with other monomers and a photo-initiator, is used to form a cured layer with a glass transition temperature of at least 120°C, suitable for inkjet-based adaptive planarization.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If conventional IAP materials are used, then the planarization process can be performed, but the glass transition temperature is insufficient and dry etch performance is poor

Engineering Contradiction:
Improveglass transition temperatureVSAvoiddry etch performance
Core Design Contradiction:
TemperatureVSReliability

Solution Approach 1:

The patent changes the chemical composition parameters of the photocurable material by incorporating specific multi-functional monomers (Formula 1) with allyloxymethyl acrylate structures in controlled amounts (5-20 wt%). This compositional parameter change simultaneously achieves higher glass transition temperature (≥120°C) and improved dry etch performance, resolving the contradiction between thermal properties and process compatibility

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent creates a composite photocurable composition by combining multiple components: multi-functional monomers of Formula (1), other multi-functional monomers, mono-functional monomers, and photo-initiators. This composite material approach allows synergistic effects where the combination achieves both high glass transition temperature and good dry etch performance that individual components cannot achieve alone

Inventive Principle:
Principle #40Composite materials

2Manufacturing precision

If the composition is made highly viscous to improve planarization quality, then surface flatness improves, but inkjet dispensing becomes difficult

Engineering Contradiction:
Improvesurface flatnessVSAvoidinkjet dispensing
Core Design Contradiction:
Manufacturing precisionVSEase of operation

Solution Approach 1:

The patent optimizes the viscosity parameter of the photocurable composition by controlling monomer selection and ratios, achieving a balanced viscosity range that enables both inkjet dispensing and high-quality planarization. The specific composition of multi-functional and mono-functional monomers is tuned to achieve optimal rheological properties for the inkjet process while maintaining surface flatness

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The composition achieves a high glass transition temperature and low viscosity, enabling effective planarization and improved dry etch performance, making it suitable for subsequent processing steps in electronic circuit fabrication.

Implementation Method 1

a photocurable composition can comprise a polymerizable material and a photo-initiator

Methodology Applied
Scientific EffectPhotopolymerisation: Photopolymerisation

Data Source

PatentUS12065573B2Photocurable composition
Publication Date: 2024.08.20 CANON KK
  • US12065573B2 patent drawing
  • US12065573B2 patent drawing
  • US12065573B2 patent drawing

AI summary

A photocurable composition can comprise a polymerizable material and an initiator. The polymerizable material can include at least one first multi-functional monomer containing an allyloxymethyl methacrylate structure in an amount at least 5 wt % and not greater than 20 wt % based on the polymerizable material. The photocurable composition can be suitable for use in inkjet adaptive planarization and may be adapted to form cured layers having a glass transition temperature of at least 120° C.