Photocurable Polymer Gate Dielectrics for TFT Stability

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Solution Overview

Problem

Current semiconductor transistors face challenges with gate bias stress effects, which affect the stability and performance of thin-film transistors (TFTs) due to charge trapping and water interaction at the dielectric-semiconductor interface, requiring dielectric materials that are resistant to these issues while being compatible with solution-phase deposition methods.

Innovation Solution

Development of crosslinked organic polymers with specific repeating units that can be solution-processed into thin films, exhibiting properties such as low leakage current, high breakdown voltage, and air and water stability, suitable for use as gate dielectric materials in TFTs.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional dielectric materials are used in TFTs, then manufacturing processes are simpler, but gate bias stress effects cause performance degradation and instability

Engineering Contradiction:
Improvestability against gate bias stressVSAvoidcompatibility with solution-phase deposition
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent modifies the chemical composition and molecular structure of dielectric materials by incorporating specific repeating units with electron-withdrawing groups, fluorine atoms, and crosslinkable functional groups. These parameter changes in material composition enable resistance to gate bias stress effects while maintaining solution-processability, resolving the contradiction between reliability and ease of manufacture

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent develops copolymer dielectric materials combining different repeating units with complementary functions: one unit provides electrical stability and electron-withdrawing properties, another unit enables crosslinking for mechanical robustness, and a third unit ensures solution-processability. This composite approach achieves both high reliability against gate bias stress and compatibility with solution-phase deposition methods

Inventive Principle:
Principle #40Composite materials

2Power

If the gate dielectric layer is made thinner to reduce driving voltage, then voltage gradient increases and charge carrier generation improves, but material breakdown and current leakage worsen

Engineering Contradiction:
Improvedriving voltageVSAvoidelectrical breakdown strength
Core Design Contradiction:
PowerVSReliability

Solution Approach 1:

The patent introduces crosslinkable functional groups that form three-dimensional crosslinked networks within the dielectric layer. This structural parameter change dramatically increases electrical breakdown strength and reduces current leakage, enabling the use of thinner dielectric layers for reduced driving voltage without sacrificing reliability

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent employs photodimerization reactive groups that form cyclic crosslinked structures when exposed to light. This creates a densely crosslinked three-dimensional network that enhances electrical insulation properties, allowing thinner dielectric layers to maintain high breakdown strength and prevent current leakage while reducing driving voltage

Inventive Principle:
Principle #14Spheroidality (Curvature)

3Manufacturing precision

If high curing dose is applied to crosslink the dielectric layer, then crosslinking efficiency improves, but damage to adjacent organic semiconductor layers occurs

Engineering Contradiction:
Improvecrosslinking completenessVSAvoiddamage to organic semiconductor layer
Core Design Contradiction:
Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The patent selects photodimerization reactive groups with absorption maxima in the 300-400 nm range, which corresponds to near-UV light. This parameter change in light wavelength enables effective crosslinking at lower curing doses compared to conventional UV-curable systems, preventing damage to adjacent organic semiconductor layers while achieving complete crosslinking

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent uses near-UV light as an intermediary energy carrier that can penetrate the dielectric layer and activate photodimerization reactive groups without causing excessive energy damage to the organic semiconductor layer. This intermediary approach enables controlled crosslinking at lower doses, resolving the contradiction between crosslinking completeness and protection of adjacent layers

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The proposed organic materials demonstrate improved resistance to gate bias stress, high electrical breakdown strength, and low leakage properties, enhancing the stability and performance of TFTs while being compatible with existing microfabrication technologies and suitable for flexible and transparent display applications.

Implementation Method 1

The gate dielectric of a TFT electrically insulates the gate from the semiconductor channel

Methodology Applied
Scientific EffectElectrical insulation: Dielectric

Implementation Method 2

Crosslinking of this insulating layer material requires a high curing dose, and can be achieved by applying electromagnetic waves or heat to the coating layer

Methodology Applied
Scientific EffectPhotocrosslinking: Photopolymerisation

Data Source

PatentEP2812931B1Electronic devices comprising photocurable polymeric materials
Publication Date: 2018.06.13 FLEXTERRA INC
  • EP2812931B1 patent drawingFigure 1a~2
  • EP2812931B1 patent drawingFigure 3a~3b
  • EP2812931B1 patent drawingFigure 4~5b

AI summary

Disclosed are photocurable polymers that can be used as active and/or passive organic materials in various electronic, optical, and optoelectronic devices. In some embodiments, the device can include a dielectric layer prepared from such photocurable polymers. In some embodiments, the device can include a passivation layer prepared from the polymers described herein..