Integrated Photodetector Carrier Capture for Spectrometer Alignment

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Solution Overview

Problem

Conventional spectrometers with diffraction gratings face challenges in achieving high positioning precision due to complex alignment and manufacturing processes, particularly with the photodiode array and light entrance member, which complicates the alignment of components.

Innovation Solution

A photodetector with a substrate-integrated photodetecting element array and light entrance portion, along with a carrier capturing portion between the photodetecting elements and light entrance, allows for precise positioning and arrangement of components, enabling high precision in spectral component detection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If the photodiode array and light entrance member are positioned separately with complex alignment steps, then the positioning precision can be improved, but the device complexity and manufacturing difficulty increase

Engineering Contradiction:
Improvepositioning precisionVSAvoidalignment complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent merges the light entrance member and photodiode array into a single integrated structure where the light entrance member is formed directly on the substrate in predetermined positional relationship with the photodiode array elements. This integration eliminates the need for separate alignment steps while maintaining high positioning precision, as the components are positioned relative to each other during the same manufacturing process.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent implements preliminary positioning by forming the light entrance member and photodiode array in a predetermined positional relationship during the semiconductor manufacturing process. The positions are determined in advance through photolithography patterns and etching steps, ensuring high positioning precision before the components are assembled into the final device.

Inventive Principle:
Principle #10Preliminary action

2Manufacturing precision

If the light entrance member restricts the optical path to improve measurement precision, then the positioning precision is improved, but carriers generated near the light entrance portion increase noise

Engineering Contradiction:
Improvepositioning precisionVSAvoidnoise from carriers
Core Design Contradiction:
Manufacturing precisionVSObject-generated harmful factors

Solution Approach 1:

The patent extracts and removes carriers generated near the light entrance portion through dedicated carrier removal structures. These structures selectively remove excess carriers that would otherwise reach the photodiode array and create noise, while preserving the beneficial positioning and optical path restriction functions of the light entrance member.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent introduces intermediary structures between the light entrance member and photodiode array that act as mediators to manage carrier flow. These intermediary regions control the movement of carriers generated by incident light, preventing noise-generating carriers from reaching the photodiode elements while allowing the optical path restriction function to operate effectively.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration simplifies the alignment process, enhances positioning precision, and allows for effective detection of spectral components, even when light is incident directly on the substrate, reducing noise and improving detection accuracy.

Implementation Method 1

a photodetecting element array, having a plurality of photodetecting elements formed in a predetermined array on the substrate

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Implementation Method 2

capturing carriers generated when light is illuminated onto a substrate portion near the light entrance portion, and removing the carriers to the exterior

Methodology Applied
Scientific EffectCharge separation: Photoelectric Effect

Data Source

PatentUS8125636B2Photodetector and spectrometer using the same
Publication Date: 2012.02.28 HAMAMATSU PHOTONICS KK
  • US8125636B2 patent drawing
  • US8125636B2 patent drawing
  • US8125636B2 patent drawing

AI summary

A photodiode array, having a plurality of photodiodes 12 (n-type channel regions 121), and a light entrance portion 13, formed of an opening that is used to make light to be detected by photodiodes 12 enter, are provided in a substrate 10 of a photodetector 1A having an n-type substrate 101 and a p-type epitaxial layer 102. Furthermore, a carrier capturing portion 60, for capturing carriers generated at a substrate portion near the light entrance portion 13 and removes the captured carriers to the exterior via an electrode 61, is arranged from a layer portion of the epitaxial layer 102 that is positioned between the photodiode array 11 and the light entrance portion 13. A photodetector of a simple arrangement, which, when applied to a spectrometer, enables the positioning precision of components of the spectrometer to be improved, and a spectrometer using this photodetector are thus realized.