Avalanche Photodetector Charge Sheet Thickness Control

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Solution Overview

Problem

Current avalanche photodetectors face challenges in reducing dark current and enhancing gain, particularly in the design of multiplication and absorption regions, which affects their sensitivity and performance.

Innovation Solution

A vertically-stacked structure for an avalanche photodetector is developed, featuring a charge sheet with varying thickness and a multiplication region with corrugations, positioned between the absorption and multiplication regions, to control the electric field and enhance signal amplification.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-generated harmful factors

If a conventional avalanche photodetector structure is used, then the device is simpler to manufacture, but dark current is higher and gain is reduced

Engineering Contradiction:
Improvedark currentVSAvoidstructure complexity
Core Design Contradiction:
Object-generated harmful factorsVSDevice complexity

Solution Approach 1:

The photodetector structure is divided into distinct functional regions: a multiplication region with a first semiconductor layer and an absorption region with a second semiconductor layer. This segmentation allows independent optimization of each region's properties to reduce dark current while maintaining manufacturing feasibility

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different semiconductor layers are used with specific properties optimized for their local function: the first layer (multiplication region) is designed for carrier multiplication with specific thickness and doping, while the second layer (absorption region) is optimized for photon absorption. This local quality differentiation reduces dark current by ensuring each region performs its specific function efficiently

Inventive Principle:
Principle #3Local quality

2Power

If a conventional avalanche photodetector structure is used, then the device is simpler to manufacture, but gain is reduced

Engineering Contradiction:
ImprovegainVSAvoidstructure complexity
Core Design Contradiction:
PowerVSDevice complexity

Solution Approach 1:

The device is segmented into a multiplication region and an absorption region, allowing the multiplication region to be specifically engineered for high gain through controlled avalanche breakdown, while the absorption region focuses on efficient photon detection. This segmentation enables gain enhancement without requiring complete structural redesign

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The thickness of the first semiconductor layer in the multiplication region is optimized to control the electric field distribution and avalanche multiplication efficiency. By adjusting this parameter, gain is enhanced while maintaining a manageable structural complexity

Inventive Principle:
Principle #35Parameter changes

3Measurement precision

If the thickness of semiconductor layers is increased, then sensitivity is improved, but bandwidth is reduced

Engineering Contradiction:
ImprovesensitivityVSAvoidbandwidth
Core Design Contradiction:
Measurement precisionVSSpeed

Solution Approach 1:

The thickness of the first semiconductor layer in the multiplication region is optimized to balance sensitivity and bandwidth. A thinner multiplication region improves bandwidth by reducing carrier transit time, while still providing sufficient multiplication gain. The second semiconductor layer thickness is optimized for photon absorption efficiency, improving sensitivity without excessively increasing total device thickness

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent introduces a vertically stacked configuration with distinct functional layers, allowing independent optimization of thickness parameters for each layer. This dimensional arrangement enables sensitivity improvement through adequate absorption path length while maintaining bandwidth through controlled multiplication region thickness

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution reduces dark current and provides gain enhancement compared to conventional designs, allowing for improved sensitivity and adjustable bandwidth through the optimized thickness of semiconductor layers.

Implementation Method 1

The charge sheet has a thickness that varies with position in a horizontal plane, and the charge sheet is positioned in the vertical direction between the second semiconductor layer and the first portion of the first semiconductor layer

Methodology Applied
Scientific EffectElectric field control: Electric Field

Implementation Method 2

By applying a high reverse bias voltage that is less than the breakdown voltage, an avalanche photodetector exhibits an internal current gain effect because of impact ionization that produces an avalanche effect

Methodology Applied
Scientific EffectImpact ionization: Ionisation

Implementation Method 3

an avalanche photodetector exhibits an internal current gain effect because of impact ionization that produces an avalanche effect

Methodology Applied
Scientific EffectAvalanche effect: Avalanche Breakdown

Implementation Method 4

An avalanche photodetector, also known as an avalanche photodiode, is a highly-sensitive semiconductor photodetector that relies upon the photoelectric effect to convert light into countable current pulses

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentUS11721780B2Avalanche photodetectors with a multiple-thickness charge sheet
Publication Date: 2023.08.08 GLOBALFOUNDRIES US INC
  • US11721780B2 patent drawing
  • US11721780B2 patent drawing
  • US11721780B2 patent drawing

AI summary

Structures for an avalanche photodetector and methods of forming a structure for an avalanche photodetector. The structure includes a first semiconductor layer having a first portion and a second portion, and a second semiconductor layer stacked in a vertical direction with the first semiconductor layer. The first portion of the first semiconductor layer defines a multiplication region of the avalanche photodetector, and the second semiconductor layer defines an absorption region of the avalanche photodetector. The structure further includes a charge sheet in the second portion of the first semiconductor layer. The charge sheet has a thickness that varies with position in a horizontal plane, and the charge sheet is positioned in the vertical direction between the second semiconductor layer and the first portion of the first semiconductor layer.