Photodetector Detection-Time Control via Substrate Depth Limitation

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Solution Overview

Problem

Sensitive photodetectors in LIDAR systems, such as APDs and SPADs, face accuracy issues due to dark current caused by minority carriers generated in the substrate, which persist even after the light source is turned off, leading to spurious signals and increased time constants in detection events.

Innovation Solution

The introduction of surface defects, crystallographic defects, limited substrate depth, specific band structures, anti-reflective layers, polishing, and band-reject optical filters to mitigate dark current by reducing minority carrier diffusion and photoexcitation within the substrate.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If sensitive photodetectors (APDs, SPADs) are used to detect light, then detection sensitivity is improved, but dark current increases due to minority carriers generated in the substrate

Engineering Contradiction:
Improvedetection sensitivityVSAvoiddark current
Core Design Contradiction:
Measurement precisionVSObject-generated harmful factors

Solution Approach 1:

The patent extracts and removes the substrate from the photodetector structure, transitioning from bulk photodetectors to thin-film or substrate-free designs. This eliminates the source of minority carrier generation while preserving the active detection region, thereby reducing dark current without compromising detection sensitivity.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent applies different material compositions and doping concentrations specifically in the detection region rather than uniformly throughout the substrate. This localized optimization enhances detection sensitivity in the active area while minimizing minority carrier generation in regions that would otherwise contribute to dark current.

Inventive Principle:
Principle #3Local quality

2Object-generated harmful factors

If surface defects are introduced to reduce dark current, then dark current reduction is improved, but detection accuracy may be affected

Engineering Contradiction:
Improvedark currentVSAvoiddetection accuracy
Core Design Contradiction:
Object-generated harmful factorsVSMeasurement precision

Solution Approach 1:

The patent removes the substrate that would require defect engineering, eliminating the trade-off between dark current reduction and detection accuracy. By using thin-film or substrate-free structures, the system achieves dark current reduction through geometric elimination rather than defect introduction, preserving detection accuracy.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent employs composite material structures with carefully engineered interfaces and doping profiles that provide both dark current suppression and maintained detection accuracy without relying on surface defects. The composite structure allows optimization of each layer's properties to simultaneously achieve both goals.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

These techniques effectively reduce dark current, improving detection accuracy and reducing the time constant associated with illumination events, allowing for faster and more reliable photodetector performance in LIDAR systems.

Implementation Method 1

minority carriers photoexcited in the substrate based on the light emitted from the light source

Methodology Applied
Scientific EffectPhotoexcitation: Photoelectric Effect

Implementation Method 2

The surface defects allow for recombination of electrons and holes so as to mitigate dark current

Methodology Applied
Scientific EffectRecombination:

Implementation Method 3

The photodetector is arranged to detect light emitted from a light source that irradiates a top surface of the device

Methodology Applied
Scientific EffectPhotoelectric Effect: Photoelectric Effect

Data Source

PatentEP3747056B1Controlling detection time in photodetectors
Publication Date: 2023.09.06 WAYMO LLC
  • EP3747056B1 patent drawingFigure 1A
  • EP3747056B1 patent drawingFigure 1B
  • EP3747056B1 patent drawingFigure 2A

AI summary

Example embodiments relate to controlling detection time in photodetectors. An example embodiment includes a device. The device includes a substrate. The device also includes a photodetector coupled to the substrate. The photodetector is arranged to detect light emitted from a light source that irradiates a top surface of the device. A depth of the substrate is at most 100 times a diffusion length of a minority carrier within the substrate so as to mitigate dark current arising from minority carriers photoexcited in the substrate based on the light emitted from the light source.