Insulative-Collar Photodetector Structure for Lower Dark Current

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Solution Overview

Problem

PIN photodetectors are hindered by dark current, which causes noise and degrades performance, as it flows even in the absence of photons.

Innovation Solution

A photodetector structure is developed with a stack of undoped semiconductor layers and an insulative collar to reduce dark current, featuring epitaxial silicon and germanium layers, and a doped semiconductor material with opposite polarity, along with a second contact structure to bias the doped well, enhancing performance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a conventional PIN photodetector structure is used, then the device can detect photons, but dark current flows through the device causing noise and degrading performance

Engineering Contradiction:
Improvephotodetector performanceVSAvoiddark current
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The photodetector structure is segmented into distinct regions: a first doped semiconductor region, an intrinsic semiconductor region, and a second doped semiconductor region with opposite polarity. The insulative collar further segments the structure by laterally surrounding the intrinsic region and blocking dark current paths at the interface between the intrinsic region and the second doped region. This segmentation isolates the intrinsic region where photon detection occurs from the doped regions that generate dark current.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The insulative collar acts as an intermediary element positioned at the interface between the intrinsic semiconductor region and the second doped semiconductor region. It mediates the interaction between these regions by providing electrical insulation that blocks dark current while allowing the photodetector to maintain its PIN structure for photon detection. The collar material serves as a barrier that prevents harmful charge carrier generation at the interface.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Ease of manufacture

If doped semiconductor regions are used to form the PIN structure, then the photodetector can be manufactured with standard processes, but dark current is generated at the interfaces between doped and intrinsic regions

Engineering Contradiction:
Improvefabrication processVSAvoidinterface dark current
Core Design Contradiction:
Ease of manufactureVSObject-generated harmful factors

Solution Approach 1:

The insulative collar serves as an intermediary barrier placed at the critical interface between the intrinsic and second doped semiconductor regions. This collar prevents direct contact between the intrinsic region and the heavily doped region, thereby blocking the generation of dark current at the interface while allowing the rest of the device to be manufactured using standard semiconductor fabrication processes.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The insulative collar is applied locally only at the specific interface region where dark current generation occurs, rather than throughout the entire device. This localized approach maintains the ease of manufacture by using targeted processing steps (such as selective deposition or etching) while addressing the specific problem of interface dark current without requiring complete redesign of the manufacturing process.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The structure effectively lowers dark current and improves quantum efficiency, providing improved operational performance compared to conventional photodetectors.

Implementation Method 1

an insulative collar laterally surrounding the first semiconductor layer, the insulative collar on the first portion of the doped well between the first semiconductor layer and a second portion of the doped well

Methodology Applied
Scientific EffectElectrical insulation: Electrical Resistance

Implementation Method 2

A 'PIN photodetector' is a diode with an undoped intrinsic semiconductor region between a p-typed semiconductor and an n-type semiconductor region

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Data Source

PatentUS20230387333A1Photodetector structure with insulative collar and related methods
Publication Date: 2023.11.30 GLOBALFOUNDRIES US INC
  • US20230387333A1 patent drawing
  • US20230387333A1 patent drawing
  • US20230387333A1 patent drawing

AI summary

A photodetector structure includes a first semiconductor material layer on a first portion of a doped well in a substrate. The photodetector structure includes a second semiconductor layer over the first semiconductor layer. The first and second semiconductor material layers may include an undoped semiconductor material. The photodetector structure includes an insulative collar laterally surrounding the first and second semiconductor material layers. The insulative collar may include a varying horizontal thickness. The photodetector structure includes a doped semiconductor material having an opposite doping polarity relative to the doped well, and positioned over the second semiconductor material layer and the insulating collar.