Photodiode Thermal Management Using Diamond Substrate

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Solution Overview

Problem

High-power photodiodes face thermal failure and saturation due to inadequate heat dissipation, particularly with substrates like InP having low thermal conductivity, which limits their performance in high-power applications.

Innovation Solution

A photodiode structure featuring a thermally conductive diamond substrate with a small distance (no more than 7 microns) between the semiconductor layers and the substrate, enhancing heat dissipation through epitaxially grown crystalline material layers and conductive metal connections, allowing for efficient thermal transfer.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If a conventional InP substrate is used for photodiode, then the photodiode structure is simple and easy to manufacture, but heat dissipation is insufficient leading to thermal failure

Engineering Contradiction:
Improveheat dissipationVSAvoidmanufacturing complexity
Core Design Contradiction:
TemperatureVSEase of manufacture

Solution Approach 1:

The patent uses a composite structure combining InP semiconductor layers with a diamond substrate. The diamond substrate provides superior thermal conductivity (5x higher than InP) to solve heat dissipation issues, while the InP layers maintain the photodiode's optical functionality. This composite approach resolves the contradiction by integrating materials with complementary properties.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent introduces a thin adhesive layer as an intermediary between the InP photodiode structure and the diamond substrate. This adhesive layer facilitates thermal transfer while enabling mechanical bonding, thus improving heat dissipation without compromising manufacturing feasibility through simple bonding processes.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Power

If high power is applied to photodiode to increase output, then the photodiode can drive high-power antenna arrays, but thermal saturation occurs due to excessive heat generation

Engineering Contradiction:
Improveoutput powerVSAvoidthermal stability
Core Design Contradiction:
PowerVSReliability

Solution Approach 1:

The diamond substrate serves as a high-power thermal management platform, enabling the photodiode to operate at higher power levels without thermal saturation. The exceptional thermal conductivity of diamond allows dissipation of high power densities, thus increasing output power while maintaining thermal stability and reliability.

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The patent changes the thermal conductivity parameter of the substrate from InP (68 W/mK) to diamond (>2000 W/mK), which fundamentally alters the heat dissipation capability. This parameter change enables the system to handle higher power levels while maintaining thermal stability, resolving the contradiction between power output and thermal reliability.

Inventive Principle:
Principle #35Parameter changes

3Temperature

If the distance between semiconductor layers and substrate is reduced to improve heat transfer, then thermal conductivity increases, but manufacturing precision requirements increase

Engineering Contradiction:
Improvethermal transfer efficiencyVSAvoidspacing control
Core Design Contradiction:
TemperatureVSManufacturing precision

Solution Approach 1:

The thin adhesive layer acts as an intermediary that maintains a controlled small distance (no more than 7 microns) between the semiconductor layers and diamond substrate. This adhesive layer ensures optimal thermal contact while providing manufacturing tolerance, thus improving thermal transfer efficiency without excessively increasing precision requirements.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent optimizes the spacing parameter to be no more than 7 microns, which is sufficiently small to ensure efficient thermal transfer but large enough to accommodate manufacturing variations. This parameter optimization resolves the contradiction by finding the optimal balance point between thermal performance and manufacturability.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration significantly improves heat dissipation, reducing the risk of thermal failure and enabling higher power handling capabilities for photodiodes by leveraging the high thermal conductivity of diamond.

Implementation Method 1

heat dissipation through the anode/cathodes of the photodiode to conductive structure on the thermally conductive substrate

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

the photodiode converting the light to an RF electrical signal

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Implementation Method 3

epitaxially growing a plurality of crystalline material layers

Methodology Applied
Scientific EffectEpitaxial growth: Epitaxy

Data Source

PatentUS11004989B2Photodiodes formed on a thermally conductive layer and, photodiode systems
Publication Date: 2021.05.11 PHASE SENSITIVE INNOVATIONS INC
  • US11004989B2 patent drawing
  • US11004989B2 patent drawing
  • US11004989B2 patent drawing

AI summary

A photodiode device and method of manufacturing the same are disclosed. A stack of functional layers of the photodiode device, formed of crystalline semiconductor material, may be formed on a highly thermally conductive substrate, such as diamond or SiC. The stack of functional layers may be in contact with or close proximity to the thermally conductive substrate to thereby provide an efficient thermal conductive path between the functional layers and an external source, thereby mitigating problems that may result from overheating the photodiode device.