Photoelectric Conversion Element Dual Insulating Layer Hydrogen Sealing
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Solution Overview
Problem
Solid-state imaging devices face challenges in achieving high functional performance, particularly in suppressing the entry of hydrogen and water into semiconductor layers, which can lead to characteristic deterioration and noise in photoelectric conversion elements.
Innovation Solution
A photoelectric conversion element is designed with a semiconductor substrate, a first and second photoelectric converter, a first insulating layer, and an optical filter, where the second insulating layer has higher hydrogen and water sealing properties than the first, preventing the entry of these substances into the semiconductor layer or photoelectric conversion layer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a first insulating layer is provided between the first photoelectric converter and the second photoelectric converter, then the structural complexity is reduced and manufacturing is simplified, but hydrogen and water can still enter the semiconductor layer or photoelectric conversion layer causing characteristic deterioration
Solution Approach 1:
The patent uses a composite insulating layer structure combining a first insulating layer (e.g., silicon oxide) and a second insulating layer (e.g., silicon nitride or silicon oxynitride). Each layer has different properties: the first layer provides basic insulation, while the second layer provides superior hydrogen and water sealing properties. This composite structure achieves both manufacturing feasibility and high reliability by preventing hydrogen and water entry into the semiconductor and photoelectric conversion layers.
2Adaptability or versatility
If the second photoelectric converter is positioned to overlap the first photoelectric converter in the thickness direction, then the device achieves multi-wavelength detection capability, but the risk of hydrogen and water entry from intermediate layers increases
Solution Approach 1:
The patent introduces a second insulating layer as an intermediary barrier between the first and second photoelectric converters. This intermediate layer acts as a protective mediator that specifically blocks hydrogen and water molecules from reaching the semiconductor layer and photoelectric conversion layer, while allowing the stacked structure to maintain its multi-wavelength detection functionality.
3Reliability
If materials with higher hydrogen and water sealing properties are used for the second insulating layer, then the suppression of hydrogen and water entry is improved, but the device complexity increases
Solution Approach 1:
The patent segments the insulating layer function into two distinct layers: the first insulating layer provides basic electrical insulation and structural support, while the second insulating layer specifically addresses hydrogen and water sealing. This segmentation allows each layer to be optimized for its specific function using appropriate materials and thicknesses, achieving high reliability without excessive overall complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively suppresses characteristic deterioration and noise, enhancing the performance and reliability of the photoelectric conversion elements by preventing hydrogen and water ingress, thereby improving the overall functionality of the solid-state imaging device.
Implementation Method 1
a second insulating layer provided between the semiconductor layer and the first insulating layer, and including a material having a higher hydrogen sealing property and a higher water sealing property than a material of the first insulating layer
Implementation Method 2
a second insulating layer provided between the semiconductor layer and the first insulating layer, and including a material having a higher hydrogen sealing property and a higher water sealing property than a material of the first insulating layer
Implementation Method 3
The first photoelectric converter is provided on the semiconductor substrate, and detects light in a first wavelength range including a visible light range and photoelectrically converts the light
Implementation Method 4
The second photoelectric converter is provided at a position overlapping the first photoelectric converter in a thickness direction of the semiconductor substrate in the semiconductor substrate, and detects light in a second wavelength range including an infrared light range and photoelectrically converts the light
Implementation Method 5
The optical filter is embedded in the first insulating layer and has a transmission band in the infrared light range
Data Source
AI summary
A photoelectric conversion element according to an embodiment of the present disclosure includes a semiconductor substrate, a first photoelectric converter, a second photoelectric converter, a first insulating layer, and an optical filter. The first photoelectric converter detects visible light and photoelectrically converts the visible light. The second photoelectric converter detects infrared light and photoelectrically converts the infrared light. The first insulating layer is provided between the first photoelectric converter and the second photoelectric converter. The optical filter is embedded in the first insulating layer and has a transmission band in an infrared light range. The first photoelectric converter includes a second insulating layer including a material having a higher hydrogen sealing property and a higher water sealing property than a material of the first insulating layer.