Photomask Verification Using AI-Predicted Characterization Data

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Solution Overview

Problem

The existing data verification process for photomask products, particularly for flash memory, is time-consuming due to the need to measure multiple combinations of characteristic parameters.

Innovation Solution

A data verification method utilizing an AI model to predict characterization data of a new photomask product based on characterization data of an old photomask product, reducing the need for full measurement by using a data verification model that updates with first and second characterization data.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If multiple combinations of characteristic parameters are measured for photomask product verification, then measurement completeness and reliability are improved, but verification time increases significantly

Engineering Contradiction:

Improvemeasurement completenessVSAvoidverification time

Core Design Contradiction:

ReliabilityVSLoss of time

Solution Approach 1:

The patent applies partial action by measuring only a subset of characteristic parameters (first characterization data) rather than all parameters, and using AI prediction to obtain the remaining parameters (second characterization data). This partial measurement approach significantly reduces verification time while maintaining measurement completeness through the combination of actual measurements and AI-predicted values.

Inventive Principle:

Principle #16Partial or excessive action

Solution Approach 2:

The patent replaces the mechanical measurement system with an AI-based prediction system for certain characterization parameters. Instead of physically measuring all parameters through time-consuming instrumentation, the system uses a trained AI model to predict unmeasured parameters based on measured ones, substituting physical measurement with computational prediction to reduce verification time.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Measurement precision

If full measurement of all characterization data is performed, then measurement precision is improved, but productivity decreases

Engineering Contradiction:

Improvecharacterization data accuracyVSAvoidverification throughput

Core Design Contradiction:

Measurement precisionVSProductivity

Solution Approach 1:

The system performs partial measurement of characterization data using actual measurement equipment, then supplements the remaining data through AI prediction. This approach maintains measurement precision for the measured parameters while significantly improving productivity by avoiding the need to physically measure all parameters.

Inventive Principle:

Principle #16Partial or excessive action

Solution Approach 2:

The AI model creates a virtual copy or prediction of unmeasured characterization data based on the measured data and patterns learned from historical measurement data. This copying approach allows the system to obtain complete characterization information without performing complete physical measurements, thereby improving verification throughput while maintaining data accuracy.

Inventive Principle:

Principle #26Copying

Data Source

PatentUS20250390016A1Data verification method of photomask product, computer-readable recording media and electronic apparatus

Publication Date: 2025.12.25 WINBOND ELECTRONICS CORP

AI summary

A data verification method of a photomask product is disclosed. The data verification method includes: measuring first characterization data of a first photomask product; predicting second characterization data of the first photomask product using a data verification model based on the first characterization data and reference characterization data; updating the data verification model of the first photomask product according to the first characterization data and the second characterization data; and updating the data verification model in a database for future photomask product predictions.