Photomask Data Processing System Parallel Analysis Conversion
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The conventional photomask manufacturing process is inefficient due to separate and independent drawing data analysis and inspecting data conversion steps, leading to increased operation costs and time, as well as incompatibility of drawing data formats across different apparatuses, resulting in excessive analysis time and operational inefficiencies.
Innovation Solution
A photomask manufacturing support system that integrates drawing data analysis and inspecting data conversion using a drawing data interpreting unit, data analysis unit, and data conversion unit, allowing for parallel processing and reducing the need for multiple operators, while converting graphic information into a common format for defect inspection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If drawing data analysis and inspecting data conversion are carried out separately and independently, then each step can be controlled uniquely, but operation time increases and operation costs increase
Solution Approach 1:
The patent merges the drawing data analysis step and the inspecting data conversion step into a single integrated processing step. The data processing apparatus performs both functions simultaneously by interpreting drawing data to generate both analysis results and inspection data, eliminating the need for separate independent processing steps and reducing total operation time.
2Measurement precision
If drawing data is separately analyzed in two independent steps, then comprehensive analysis can be performed, but excessive time is required for the analysis
Solution Approach 1:
The patent implements continuous useful action by performing drawing data analysis and inspection data conversion in an uninterrupted sequential manner within a single processing step. The apparatus continuously processes drawing data to generate both analysis results and inspection data without idle time between steps, maintaining comprehensive analysis while reducing total analysis time.
3Adaptability or versatility
If multiple drawing data formats are supported for different drawing apparatuses, then compatibility is improved, but the number of operations increases and efficiency decreases
Solution Approach 1:
The patent implements a universal data processing apparatus that can handle multiple drawing data formats through a single integrated processing step. The apparatus is designed to interpret various drawing data formats and generate both analysis results and inspection data universally, eliminating the need for separate processing steps for each format and improving processing efficiency while maintaining compatibility.
Data Source
AI summary
A drawing data inputting/interpreting section of a data processing device reads in hierarchical structured drawing data from a first memory device and stores interpreted drawing data information extracted as graphic information in a second memory device. A data analysis section reads in the interpreted drawing data information, analyzes information necessary for a drawing step, and stores the same as drawing analysis results in the second memory device. In addition, a data conversion section reads in the interpreted drawing data information, and after a format conversion to inspection data, stores the converted inspection data in the second memory device. Thereby, a drawing data analysis step and an inspecting data conversion step can be carried out in parallel.