Photomask Pixel Circuit Interruptions to Prevent Exposure ESD
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Solution Overview
Problem
The accumulation of electrostatic charges on photomasks during the exposing process leads to Electro Static Discharge (ESD), causing circuit damage and affecting the yield of drive circuit manufacturing in display panels.
Innovation Solution
Incorporating interruptions in the pixel control circuit patterns of the photomask with a preset distance to release static electricity, ensuring the photomask design can effectively dissipate electrostatic charges and reduce the risk of ESD.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If photomask is used for exposing during drive circuit manufacturing, then the display panel can be manufactured with GOA technology, but the photomask accumulates electrostatic charges causing ESD that damages circuits and reduces yield
Solution Approach 1:
The pixel control circuit pattern on the photomask is divided into multiple segments by introducing interruptions. These interruptions break the continuous conductive path into discrete sections, allowing electrostatic charges to be released at multiple points along the pattern rather than accumulating in a continuous structure, thereby preventing ESD damage during exposing
Solution Approach 2:
The interruptions in the pixel control circuit pattern act as intermediary elements that facilitate the release of electrostatic charges. By introducing these intermediate structures, the photomask can dissipate accumulated charges through the interruptions, preventing the buildup that would lead to harmful ESD events
2Reliability
If photomask pattern is made continuous for complete circuit design, then the circuit functionality is maintained, but electrostatic charge accumulation occurs leading to ESD
Solution Approach 1:
The continuous pixel control circuit pattern is segmented into multiple sections by introducing interruptions at specific locations. This segmentation maintains the essential circuit functionality while creating multiple discharge paths that prevent electrostatic charge accumulation, thereby eliminating ESD risk without compromising circuit operation
Solution Approach 2:
The interruptions are strategically placed at specific locations within the pixel control circuit pattern where they provide localized electrostatic discharge capability. This local modification allows the majority of the circuit to maintain its continuous, functional structure while specific regions are modified to release charges, preventing overall charge accumulation
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The method effectively prevents electrostatic charge accumulation, reducing the likelihood of ESD and ensuring the integrity of the formed pixel control circuits, thereby enhancing the manufacturing yield of drive circuits.
Implementation Method 1
the photomask includes pixel control circuit patterns, and the pixel control circuit patterns are provided with a plurality of interruptions configured to release static electricity generated in the pixel control circuit pattern during exposing
Data Source
AI summary
The present application disclosed a method for manufacturing a drive circuit, a drive circuit and a photomask, the method covers a photomask on the photoresist layer and performing exposing; the photomask includes pixel control circuit patterns, and the pixel control circuit patterns are provided with a plurality of interruptions, and a length of the interruption between two adjacent pixel control circuit patterns is a preset distance, to release static electricity generated in the pixel control circuit pattern during exposing; the electrostatic charges on the pixel control circuit patterns can be effectively derived, and the accumulation of electrostatic charges on the pixel control circuit patterns can be avoided, and the probability of electrostatic discharge can be reduced, thereby reducing the risk of damaging to the components used for exposing, and can ensure the integrity of the formed pixel control circuit, so that the drive circuit can operate normally.