Photomask Delivery Vehicle With Image-Based Orientation Checks

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Solution Overview

Problem

The complexity of photomask fabrication processes has increased due to the scaling down of semiconductor devices, leading to a higher frequency of substrate transfers and a higher risk of mishandling, which can result in scraping and prolonged fabrication times.

Innovation Solution

A vehicle equipped with an image capturing module and analysis system is used to ensure correct photomask orientation during transfers between fabrication tools, utilizing short-wave infrared cameras to capture alignment marks and barcodes, and adjusting orientation if necessary to prevent mishandling.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If the substrate is transferred frequently between tools during photomask fabrication, then the manufacturing process can handle complex patterns, but the risk of mishandling and scraping increases

Engineering Contradiction:

Improvecapability to handle complex photomask patternsVSAvoidrisk of photomask scraping during transfer

Core Design Contradiction:

Adaptability or versatilityVSReliability

Solution Approach 1:

A vehicle system serves as an intermediary between fabrication tools, providing a controlled environment for photomask substrate transfer. The vehicle includes a container with alignment markings that act as a mediator to ensure proper orientation and positioning during transfers, reducing mishandling risks while maintaining the ability to handle complex patterns through multiple transfers

Inventive Principle:

Principle #24Intermediary (Mediator)

2Device complexity

If manual transfer methods are used, then the system is simpler, but the orientation accuracy and alignment precision deteriorate

Engineering Contradiction:

Improvesimplicity of transfer systemVSAvoidorientation accuracy of photomask

Core Design Contradiction:

Device complexityVSManufacturing precision

Solution Approach 1:

The vehicle system incorporates alignment markings on the container bottom that provide visual feedback during the transfer process. This feedback mechanism allows operators to verify proper orientation and positioning of the photomask substrate, ensuring manufacturing precision while maintaining a relatively simple transfer system design

Inventive Principle:

Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This system minimizes the risk of photomask scraping and ensures accurate processing, reducing manufacturing expenses and delays by ensuring proper alignment and orientation during transfers.

Implementation Method 1

utilizing short-wave infrared cameras to capture alignment marks and barcodes

Methodology Applied

Scientific EffectInfrared radiation detection: Infrared Radiation

Data Source

PatentUS20250306478A1Method and system for photomask delivery

Publication Date: 2025.10.02 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

AI summary

A system for delivering a photomask is provided. The system includes a first tool and a second tool. Each of the first and the second tools is configured to handle a photomask. The system also includes a vehicle configured to move the photomask from the first tool to the second tool. A container is positioned in the vehicle and the photomask is received in the container. The system further includes an image capturing module used to produce an image of the photomask while the photomask is received within the container. In addition, the system includes a processing device used to determine whether the delivery of the photomask with the use of the vehicle from the first tool to the second tool continues based on an image analysis of the image of the photomask.