Photomask Mark On-Off Detection With Automatic Error Correction
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Solution Overview
Problem
Manual detection methods for on-off information of marks on photomasks in semiconductor manufacturing are inaccurate and labor-intensive, leading to high costs and inefficiencies.
Innovation Solution
An automated mark detection method and apparatus that acquires and compares on-off information with preset data, correcting inconsistencies to ensure accuracy and reduce labor costs, using a processor and memory to perform the detection process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual detection method is used to check on-off information of marks, then flexibility and adaptability are maintained, but detection accuracy is insufficient and labor cost is high
Solution Approach 1:
The patent replaces the manual mechanical detection method with an automated computer-based system that uses optical imaging and image processing algorithms to detect and verify mark on-off information on photomasks, thereby improving detection accuracy while reducing labor costs
Solution Approach 2:
The patent introduces an intermediary automated detection system that includes an imaging device to capture photomask images and a computer with processing algorithms to analyze the images and compare detected mark information against preset data, serving as a mediator between manual operations and final quality assurance
2Productivity
If manual detection method is used, then system complexity is low, but productivity is reduced due to high labor cost and time consumption
Solution Approach 1:
The patent segments the detection process into distinct functional modules including an imaging device for capturing photomask images, a computer for image processing and analysis, and a database for storing preset mark information, allowing each component to be optimized independently while improving overall productivity
Solution Approach 2:
The patent implements continuous automated detection and verification of mark on-off information through programmed processing steps that continuously acquire images, process them through analysis algorithms, compare results with preset data, and generate reports without manual intervention, thereby maintaining continuous useful action and improving productivity
3Reliability
If automated detection is implemented, then labor cost is reduced and detection accuracy is improved, but device complexity increases
Solution Approach 1:
The patent implements feedback mechanisms where the automated system detects mark information, compares it with preset data, identifies discrepancies, and can trigger alerts or corrections, creating a closed-loop system that continuously verifies and ensures detection reliability while maintaining manageable complexity through systematic feedback processes
Data Source
AI summary
A mark detection method includes: acquiring on-off information of marks on a photomask to be manufactured; comparing the on-off information with preset on-off information to determine whether the on-off information is consistent with the preset on-off information; and, correcting the on-off information according to the preset on-off information when it is determined that the on-off information is inconsistent with the preset on-off information. The mark detection method and apparatus and the computer-readable storage medium according to the present disclosure can automatically detect whether the on-off of marks is accurate, thereby improving the detection accuracy and reducing labor cost.