Photon Emitter and Detector Array for Surface Feature Classification
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Solution Overview
Problem
Current methods for inspecting articles, such as hard disk drives, require multiple analytical apparatuses and are time-consuming, limiting throughput in root cause failure analysis due to the need for optical analysis and subsequent techniques like AFM, SEM, and Raman spectroscopy to detect and characterize surface and subsurface defects.
Innovation Solution
An apparatus comprising a photon emitter and detector array that emits photons onto an article's surface, scattering and fluorescence are detected, processed, and used to create surface feature maps, reducing the need for multiple analyses by differentiating between inorganic and organic features through photon scattering and fluorescence patterns.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple analytical apparatuses (AFM, SEM, Raman spectroscopy) are used to detect and characterize surface defects, then measurement precision is improved, but loss of time increases and productivity decreases
Solution Approach 1:
The patent combines multiple analytical functions (optical scattering detection, fluorescence detection, and Raman spectroscopy) into a single integrated apparatus. The system uses a single photon emitter and detector array that can simultaneously or sequentially perform all three characterization methods, eliminating the need to move the sample between multiple separate instruments and thereby reducing inspection time while maintaining comprehensive defect analysis capability
Solution Approach 2:
The inspection apparatus is designed with multi-functionality, where the same hardware components (photon emitter, detector array, optical system) can perform multiple analytical functions. By configuring the system to detect both scattered photons and fluorescent photons, and to perform Raman spectroscopy, a single apparatus achieves what previously required multiple specialized instruments, thus improving productivity without sacrificing measurement precision
2Manufacturing precision
If multiple sequential analyses are performed on surface features, then manufacturing precision is improved through comprehensive defect detection, but productivity deteriorates due to time-consuming multi-step process
Solution Approach 1:
The system enables continuous inspection by performing optical scattering analysis, fluorescence detection, and Raman spectroscopy in an uninterrupted sequence within a single apparatus. The photon detector array continuously monitors scattered and fluorescent photons while the Raman spectroscopy component simultaneously analyzes molecular vibrations, eliminating idle time between analytical steps and maintaining high throughput while ensuring comprehensive defect characterization
3Reliability
If conventional optical analysis followed by AFM, SEM, and Raman spectroscopy is used, then reliability of defect classification is improved, but device complexity increases and ease of operation decreases
Solution Approach 1:
The patent merges multiple analytical apparatuses into a single integrated system. The apparatus combines optical scattering detection, fluorescence detection, and Raman spectroscopy components within one instrument, reducing the number of separate devices from four to one. This integration maintains reliable defect classification by preserving all necessary analytical functions while simplifying the overall system architecture and reducing operational complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach significantly reduces the time and number of analyses required, enhancing throughput in root cause failure analysis by efficiently detecting and characterizing surface features, including defects, with improved precision and speed.
Implementation Method 1
photons scattered from the surface features
Implementation Method 2
photons fluoresced from the surface features
Data Source
AI summary
Provided herein is an apparatus, including a photon emitter configured to emit photons onto a surface of an article, a photon detector array configured to receive photons from surface features of the article; and a processing means configured for processing photon-detector-array signals corresponding to photons scattered from the surface features and photons fluoresced from the surface features, wherein the processing means is further configured for classifying the surface features of the article.