Photonic Crystal Lower Cladding for Substrate Isolation

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Solution Overview

Problem

Current photonic devices integrated on semiconductor substrates face challenges in achieving efficient optical isolation from the substrate while maintaining low signal loss and allowing for the integration of both photonic and electronic circuits on the same substrate, as traditional substrates are often unsuitable for desired operating characteristics of electronic devices.

Innovation Solution

The use of a photonic crystal structure as a lower cladding in the substrate to isolate photonic devices from the bulk substrate material, providing a low-loss light path and allowing for integration with electronic devices by forming a periodic or quasi-periodic array of elements with a refractive index lower than the waveguide core, along with additional cladding on the sides and top.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If a traditional substrate is used for photonic devices, then the substrate can support both photonic and electronic circuits, but optical signal loss into the substrate increases and coupling between waveguide core and substrate modes occurs

Engineering Contradiction:
Improveoptical signal lossVSAvoidoptical isolation from substrate
Core Design Contradiction:
Loss of energyVSReliability

Solution Approach 1:

A photonic crystal cladding layer is introduced as an intermediary between the waveguide core and the substrate. This cladding layer has a periodic structure with a different refractive index than both the core and substrate, creating an optical barrier that prevents direct coupling between the waveguide modes and substrate modes, thereby reducing optical signal loss while maintaining isolation.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent employs a composite structure consisting of multiple layers with different optical properties: the waveguide core material, the photonic crystal cladding layer with periodic structure, and the substrate. This composite arrangement allows the system to simultaneously achieve low optical loss, effective mode isolation, and mechanical support for both photonic and electronic devices.

Inventive Principle:
Principle #40Composite materials

2Reliability

If a silicon on insulator substrate is used for optical isolation, then coupling to substrate is prevented, but integration with electronic devices becomes difficult due to unsuitable operating characteristics

Engineering Contradiction:
Improveoptical isolationVSAvoidintegration with electronic devices
Core Design Contradiction:
ReliabilityVSAdaptability or versatility

Solution Approach 1:

The photonic crystal cladding layer is applied locally only where optical isolation is needed, specifically beneath the waveguide core. The rest of the substrate maintains its original properties, allowing electronic devices to be integrated in regions where optical isolation is not required. This localized approach provides optical isolation functionality without compromising the overall substrate's suitability for electronic device integration.

Inventive Principle:
Principle #3Local quality

3Loss of energy

If additional cladding layers are added to reduce optical loss, then signal loss decreases, but device complexity increases

Engineering Contradiction:
Improvesignal lossVSAvoidcladding structure complexity
Core Design Contradiction:
Loss of energyVSDevice complexity

Solution Approach 1:

Instead of using multiple separate cladding layers with different materials, the patent employs a single photonic crystal cladding layer with a periodic structure. The periodicity creates multiple scattering centers that work together to achieve complete optical isolation, achieving the same effect as multiple layers but with simpler fabrication and fewer material interfaces.

Inventive Principle:
Principle #19Periodic action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach minimizes optical signal loss into the substrate, enabling efficient integration of photonic and electronic devices on the same substrate with reduced coupling between the waveguide core and substrate modes, supporting both TE and TM optical transmission modes with minimal transmission loss.

Implementation Method 1

a photonic crystal lower cladding layer provided on a semiconductor substrate. The photonic device includes a waveguide having a core optically isolated from the substrate by the photonic crystal lower cladding layer

Methodology Applied
Scientific EffectPhotonic crystal: Photonic Crystal

Implementation Method 2

The coupling between the optical guide modes in the waveguide core and the silicon substrate modes is inhibited by the crystal dispersion properties of the photonic crystal

Methodology Applied
Scientific EffectOptical isolation:

Implementation Method 3

enabling efficient integration of photonic and electronic devices on the same substrate with reduced coupling between the waveguide core and substrate modes, supporting both TE and TM optical transmission modes with minimal transmission loss

Methodology Applied
Scientific EffectLight transmission: Light

Data Source

PatentUS11550101B2Photonic device having a photonic crystal lower cladding layer provided on a semiconductor substrate
Publication Date: 2023.01.10 MICRON TECHNOLOGY INC
  • US11550101B2 patent drawing
  • US11550101B2 patent drawing
  • US11550101B2 patent drawing

AI summary

An integrated photonic device is provided with a photonic crystal lower cladding on a semiconductor substrate.