Photonic Device Current Confinement Layer Patterned Doping

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Solution Overview

Problem

Conventional photonic devices suffer from unwanted conductive currents that cross the interface between the device and substrate, leading to noise and performance degradation, particularly due to dark current and sidewall leakage, which hinder signal-to-noise ratio in high-speed optical communication applications.

Innovation Solution

A photonic device structure incorporating a current confinement layer doped in a pattern with varying doping concentrations to confine currents within a heavily doped region, reducing dark current and leakage, while maintaining optical signal collection efficiency, using materials like Si, GeSi, or III-V materials grown through epitaxial processes like RPCVD or MOCVD.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the substrate layers are uniformly and heavily doped to reduce series resistance and improve electrical connection, then electrical connection is improved, but unwanted conductive currents cross the entire interface causing noise and performance degradation

Engineering Contradiction:
Improveelectrical connectionVSAvoidunwanted conductive currents
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent applies local quality by creating a patterned doping structure in the current confinement layer, where heavily doped regions are strategically positioned to provide low-resistance electrical connection, while lightly doped or intrinsic regions are placed to block unwanted conductive currents. This spatial variation in doping concentration allows simultaneous achievement of good electrical connection and current confinement.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The current confinement layer is segmented into multiple regions with different doping concentrations - heavily doped regions for electrical connection and lightly doped/intrinsic regions for current blocking. This segmentation allows the single layer to perform multiple functions: providing electrical connection in specific areas while preventing leakage currents in other areas.

Inventive Principle:
Principle #1Segmentation

2Loss of energy

If uniform heavy doping is used to improve electrical connection, then series resistance is reduced, but signal-to-noise ratio deteriorates due to increased dark current and leakage

Engineering Contradiction:
Improveseries resistanceVSAvoidsignal-to-noise ratio
Core Design Contradiction:
Loss of energyVSLoss of information

Solution Approach 1:

The patterned doping structure creates local quality variations where heavily doped regions minimize series resistance for useful currents, while lightly doped or intrinsic regions suppress dark current and leakage. This localized control of electrical properties optimizes the balance between resistance reduction and noise minimization, improving signal-to-noise ratio.

Inventive Principle:
Principle #3Local quality

3Loss of information

If a current confinement layer with patterned doping is introduced to reduce dark current, then signal-to-noise ratio is improved, but device complexity increases

Engineering Contradiction:
Improvesignal-to-noise ratioVSAvoiddoping pattern structure
Core Design Contradiction:
Loss of informationVSDevice complexity

Solution Approach 1:

The patent merges multiple functions into the current confinement layer: it simultaneously serves as a current blocking layer, an electrical contact layer (through heavily doped regions), and an optical absorption layer. This consolidation reduces the need for separate layers, thereby limiting the increase in device complexity despite the patterned doping structure.

Inventive Principle:
Principle #5Merging (Combining)

4Object-generated harmful factors

If the current confinement layer uses varying doping concentrations to confine currents, then dark current is reduced, but manufacturing precision requirements increase

Engineering Contradiction:
Improvedark currentVSAvoiddoping concentration control
Core Design Contradiction:
Object-generated harmful factorsVSManufacturing precision

Solution Approach 1:

The patent employs parameter changes by varying the doping concentration across different regions of the current confinement layer. Heavily doped regions (with high dopant concentration) provide electrical connection, while lightly doped or intrinsic regions (with low or zero dopant concentration) block dark current. This parameter variation is achieved through controlled epitaxial growth processes that can precisely manage doping profiles.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The current confinement layer effectively reduces dark current and leakage, enhancing the signal-to-noise ratio and performance of photonic devices like photodiodes and lasers by confining conductive currents within specific regions, thereby improving their operational efficiency.

Implementation Method 1

a current confinement layer disposed on the substrate, the current confinement layer being doped in a pattern and configured to reduce dark current in the device

Methodology Applied
Scientific EffectElectrical Resistance: Electrical Resistance

Implementation Method 2

an absorption layer disposed on the current confinement layer

Methodology Applied
Scientific EffectAbsorption (EM radiation): Absorption (EM radiation)

Data Source

PatentUS9373938B2Photonic device structure and fabrication method thereof
Publication Date: 2016.06.21 SIFOTONICS TECH CO LTD
  • US9373938B2 patent drawing
  • US9373938B2 patent drawing
  • US9373938B2 patent drawing

AI summary

Various embodiments of a photonic device and fabrication method thereof are described herein. A device may include a substrate, a bottom contact layer, a current confinement layer, an intrinsic layer, an absorption layer, and a top contact layer. The bottom contact layer may be of a first polarity and may be disposed on the substrate. The current confinement layer may be disposed on the bottom contact layer. The intrinsic layer may be disposed on the current confinement layer. The absorption layer may be disposed on the intrinsic layer. The top contact layer may be of a second polarity and may be disposed on the absorption layer. The second polarity is opposite to the first polarity.