Photonic Device Mechanically Isolated from Substrate
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Solution Overview
Problem
Existing photonic circuits with empty spaces between optical and mechanical elements are sensitive to substrate deformations, leading to operational instability and parasitic signal issues, as these deformations modify the optical coupling and resonance properties.
Innovation Solution
A photonic device with a structure suspended above the substrate, where optical and mechanical elements are fixed to a support rather than the substrate, maintaining empty spaces independent of substrate deformations through rigid or flexible mechanical couplings, ensuring consistent optical coupling and resonance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If the waveguide and optical resonator are fixed to the substrate, then the device structure is simple and easy to manufacture, but substrate deformations modify the optical coupling space and make the circuit inoperative or sensitive to parasitic signals
Solution Approach 1:
The device is divided into two independent parts: a substrate and a separate support structure. The waveguide and optical resonator are fixed to the support, not the substrate. This segmentation allows the support to be mechanically isolated from substrate deformations while maintaining optical coupling functionality.
Solution Approach 2:
A support structure acts as an intermediary between the substrate and the optical components. This intermediary support is mechanically coupled to the substrate but provides a stable platform for the waveguide and resonator, isolating them from substrate deformations and maintaining constant optical coupling space.
2Adaptability or versatility
If a mobile mechanical element is arranged close to the optical resonator to measure displacement, then sensing capability is enabled, but substrate deformations modify the space between the mobile element and resonator, altering the measurement
Solution Approach 1:
The mobile mechanical element and optical resonator are both fixed to the support structure, separating them from the substrate. This allows the mobile element to displace relative to the support for sensing applications while the support itself remains isolated from substrate deformations, ensuring measurement accuracy is not compromised by substrate motion.
3Adaptability or versatility
If the optical coupling space between waveguide and resonator is kept empty for sensing, then sensitivity to optical index variations is achieved, but substrate deformations modify this coupling space and render the circuit inoperative
Solution Approach 1:
The support structure serves as an intermediary platform that holds both the waveguide and optical resonator. This support isolates the empty optical coupling space from substrate deformations, allowing the space to remain constant and functional while still being sensitive to optical index variations for sensing applications.
Data Source
AI summary
A photonic device including a substrate and a structure. The structure includes a support, an optical resonator fixed to the support, and a portion of a waveguide optically coupled to the resonator and fixed to the support. The structure is suspended above the substrate. The portion of the waveguide and the resonator are arranged on a same side of the support. The support is a first portion of a layer. A second portion of the layer is fixed to the substrate. The support is mechanically coupled to the second portion of the layer.