Photonic Package Hot Spot Cooling With Embedded TEC

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Solution Overview

Problem

The thermal energy generated by a heater element in a photonic package creates a localized hot spot in the dielectric layers, posing thermal risks and reducing the reliability of the package.

Innovation Solution

Incorporating a thermoelectric cooling (TEC) device in the dielectric layers to dissipate heat from the localized hot spot region using the Peltier effect.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If a heater element is used to provide thermal energy to the photonic component, then the photonic component can be maintained at the desired operating temperature, but a localized hot spot is created in the dielectric layers causing thermal risks

Engineering Contradiction:
Improvephotonic component operating temperatureVSAvoidlocalized hot spot thermal risk
Core Design Contradiction:
TemperatureVSObject-affected harmful factors

Solution Approach 1:

A thermoelectric cooling (TEC) device is introduced as an intermediary element embedded in the dielectric layers directly beneath the photonic component. This TEC device acts as a mediator that actively removes excess heat from the localized hot spot region, allowing the heater element to maintain the photonic component at its desired operating temperature without creating harmful thermal conditions in the surrounding dielectric structure.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The solution applies local quality by embedding the TEC device specifically in the dielectric layers at the location where heat removal is most needed - directly beneath the photonic component and heater element. This localized cooling approach targets only the problematic hot spot region rather than cooling the entire package, thereby resolving the thermal contradiction in the specific area where it occurs while maintaining overall system temperature requirements.

Inventive Principle:
Principle #3Local quality

2Stability of the object's composition

If thermal energy is provided to maintain photonic component temperature, then stable operation is achieved, but reliability is reduced due to thermal risks in dielectric layers

Engineering Contradiction:
Improvephotonic component operating stabilityVSAvoidpackage reliability
Core Design Contradiction:
Stability of the object's compositionVSReliability

Solution Approach 1:

The TEC device serves as a protective intermediary that decouples the heater element's thermal output from the dielectric layers. By actively pumping heat away from the localized region, the TEC device allows the photonic component to receive necessary thermal energy for stable operation while protecting the dielectric structure from thermal degradation, thereby maintaining both stability and reliability.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The TEC device provides beforehand cushioning by proactively removing excess heat before it can accumulate to dangerous levels in the dielectric layers. This preventive cooling mechanism ensures that even though the heater element is actively providing thermal energy, the dielectric structure is protected from thermal runaway or degradation, thus maintaining package reliability while enabling stable photonic component operation.

Inventive Principle:
Principle #11Beforehand cushioning (Prior cushioning)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The TEC device effectively cools the dielectric layers, reducing thermal risks and improving the reliability of the photonic package by maintaining the modulator at a stable operating temperature.

Implementation Method 1

Incorporating a thermoelectric cooling (TEC) device in the dielectric layers to dissipate heat from the localized hot spot region using the Peltier effect

Methodology Applied
Scientific EffectPeltier effect: Peltier Effect

Data Source

PatentUS20250323120A1Semiconductor package with localized hot spot cooling solution and method for forming the same
Publication Date: 2025.10.16 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20250323120A1 patent drawing
  • US20250323120A1 patent drawing
  • US20250323120A1 patent drawing

AI summary

A semiconductor package and the method for forming the same are provided. The semiconductor package includes an oxide layer, and a waveguide and a photonic component located on a first side of the oxide layer. The semiconductor package also includes a heater element adjacent to the photonic component and configured to provide thermal energy to the photonic component. The semiconductor package also includes a redistribution structure located on a second side of the oxide layer opposite the first side. The redistribution structure includes a plurality of dielectric layers and conductive features in the dielectric layers. In addition, the semiconductor package includes a thermoelectric cooling device embedded in the dielectric layers of the redistribution structure and located directly below the photonic component.