Photonic Waveguide Structure Using High-k Gap Coupling

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Solution Overview

Problem

The integration of multi-layer waveguides in silicon photonic devices is hindered by the difficulty in controlling the nano-scale gap between them, leading to decreased coupling efficiency and increased insertion loss.

Innovation Solution

Incorporating a high-dielectric constant material between the waveguide layers to increase gap tolerance and reduce the need for precise nano-scale gap control, thereby enhancing coupling efficiency and reducing insertion loss.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a nano-scale gap is controlled between multi-layer waveguides, then coupling efficiency is improved, but manufacturing difficulty increases

Engineering Contradiction:
Improvecoupling efficiencyVSAvoidgap control precision
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

A high-dielectric constant material is introduced as an intermediary layer between the first and second waveguide layers. This intermediate material with higher dielectric constant than the surrounding insulating structure enhances the electric field confinement and coupling between waveguides, allowing for relaxed gap tolerances while maintaining high coupling efficiency

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The dielectric constant parameter of the material between waveguide layers is changed from the standard insulating material value to a higher value. This parameter change enables the system to achieve better coupling performance with less stringent gap control requirements, effectively resolving the contradiction between coupling efficiency and manufacturing precision

Inventive Principle:
Principle #35Parameter changes

2Loss of energy

If a nano-scale gap is controlled between multi-layer waveguides, then insertion loss is reduced, but manufacturing complexity increases

Engineering Contradiction:
Improveinsertion lossVSAvoidintegration process complexity
Core Design Contradiction:
Loss of energyVSDevice complexity

Solution Approach 1:

The high-dielectric constant material serves as a mediator that enhances light coupling between waveguide layers, reducing insertion loss without requiring complex nano-scale gap control mechanisms. The material's high dielectric constant creates stronger field confinement, enabling efficient energy transfer with simpler manufacturing processes

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The high-dielectric constant material improves coupling efficiency and reduces transfer length between waveguide layers, minimizing the need for precise nano-scale gap control during manufacturing.

Implementation Method 1

Incorporating a high-dielectric constant material between the waveguide layers to increase gap tolerance

Methodology Applied
Scientific EffectDielectric constant: Dielectric Permittivity

Data Source

PatentUS20260050131A1Photonic structure and method for manufacturing the same
Publication Date: 2026.02.19 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20260050131A1 patent drawing
  • US20260050131A1 patent drawing
  • US20260050131A1 patent drawing

AI summary

A photonic structure and a method for manufacturing the same are provided. The photonic structure includes a substrate, an insulating structure, a first waveguide layer, a second waveguide layer and a high-dielectric constant material. The insulating structure is located over the substrate. The first waveguide layer is embedded in the insulating structure. The second waveguide layer is embedded in the insulating structure and longitudinally spaced apart from the first waveguide layer. The high-dielectric constant material is disposed between the first waveguide layer and the second waveguide layer.