Semiconductor Photonics Modulator Heater Layout With Electrical Isolation

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Solution Overview

Problem

Existing semiconductor photonics devices face inefficiencies in maintaining consistent operating temperatures for optical modulator structures due to heat loss in dielectric layers, leading to increased power consumption and interference between modulator heater and optical modulator structures.

Innovation Solution

The integration of a modulator heater structure physically connected to the optical modulator structure through a semiconductor layer, with an isolation region to prevent electrical interference, allows direct heat transfer and maintains temperature uniformity, enhancing thermal efficiency and reducing power consumption.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Temperature

If a modulator heater structure is used to maintain operating temperature, then temperature stability is improved, but power consumption increases due to heat loss in dielectric layers

Engineering Contradiction:
Improveoperating temperature stabilityVSAvoidpower consumption
Core Design Contradiction:
TemperatureVSUse of energy by moving object

Solution Approach 1:

The patent introduces a semiconductor layer as an intermediary thermal conduction path between the modulator heater structure and the optical modulator structure. This semiconductor layer acts as a thermal bridge that directly conducts heat from the heater to the modulator, bypassing the lossy dielectric layers, thereby reducing power consumption while maintaining temperature stability.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces the conventional dielectric layer-based thermal isolation system with a semiconductor layer-based thermal conduction system. The semiconductor layer provides superior thermal conductivity compared to dielectric layers, enabling efficient heat transfer from the modulator heater structure to the optical modulator structure with minimal energy loss.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Temperature

If the modulator heater structure is placed near the optical modulator structure, then temperature control is improved, but electrical interference occurs between the two structures

Engineering Contradiction:
Improvetemperature control efficiencyVSAvoidelectrical interference
Core Design Contradiction:
TemperatureVSObject-affected harmful factors

Solution Approach 1:

The patent segments the thermal and electrical functions by placing the modulator heater structure and optical modulator structure as separate entities connected through the semiconductor layer. The isolation region physically separates the two structures while the semiconductor layer provides the thermal conduction path, thereby eliminating electrical interference while maintaining temperature control efficiency.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The semiconductor layer serves as an intermediary that provides thermal conduction between the modulator heater structure and the optical modulator structure without providing electrical connection. This thermal bridge allows heat transfer while the isolation region prevents electrical interference, solving the contradiction between temperature control and electrical isolation.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Object-affected harmful factors

If dielectric layers are used to isolate structures, then electrical isolation is improved, but thermal efficiency deteriorates due to heat loss

Engineering Contradiction:
Improveelectrical isolationVSAvoidheat loss
Core Design Contradiction:
Object-affected harmful factorsVSLoss of energy

Solution Approach 1:

The patent introduces the semiconductor layer as an intermediary that provides both thermal conduction and electrical isolation. The semiconductor layer conducts heat efficiently from the modulator heater structure to the optical modulator structure while the isolation region maintains electrical isolation, thereby eliminating heat loss through dielectric layers while preserving electrical isolation.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent changes the material parameter from dielectric layer to semiconductor layer for the thermal conduction path. The semiconductor layer has superior thermal conductivity compared to dielectric layers, fundamentally changing the thermal efficiency parameter while maintaining electrical isolation through the isolation region design.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration stabilizes resonant wavelengths and improves thermal efficiency, reducing power consumption and minimizing interference, thereby optimizing the operation of the optical modulator structure.

Implementation Method 1

The physical connection between the optical modulator structure and the modulator heater structure provides a direct path for heat to be provided from the modulator heater structure to the optical modulator structure through the semiconductor layer

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Data Source

PatentUS20250370309A1Semiconductor photonics device and methods of formation
Publication Date: 2025.12.04 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US20250370309A1 patent drawing
  • US20250370309A1 patent drawing
  • US20250370309A1 patent drawing

AI summary

A bus optical waveguide structure, an optical modulator structure, and a modulator heater structure are formed from a semiconductor layer of a semiconductor photonics device such that the bus optical waveguide structure, the optical modulator structure, and the modulator heater structure are contiguous and physically connected. The physical connection between the optical modulator structure and the modulator heater structure provides a direct path for heat to be provided from the modulator heater structure to the optical modulator structure through the semiconductor layer. An isolation region, which may include a doped region of the semiconductor layer, is included between the modulator heater structure and the bus optical waveguide structure and the optical modulator structure. The isolation region electrically isolates the modulator heater structure and the optical modulator structure. Thus, the modulator heater structure is physically connected to, and electrically isolated from, the optical modulator structure.