Positive Photosensitive Composition for Thin Film Transistor Insulation

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Solution Overview

Problem

Current positive photosensitive compositions used in displays and semiconductors lack sufficient insulation properties when cured as thin films, failing to meet the requirements for insulating films.

Innovation Solution

A positive photosensitive composition comprising a compound with an alkenyl or SiH group that decomposes to generate acidic or hydroxyl groups, combined with a hydrosilylation catalyst and a photoacid generator, to achieve excellent patterning and electrical insulation reliability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional positive photosensitive compositions (acrylic or phenolic resins) are used, then patterning properties are achieved, but insulation properties of cured thin films are insufficient

Engineering Contradiction:
Improveinsulation propertiesVSAvoidpatterning properties
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The patent combines multiple resin components (polymerizable compound, curable compound, and optional third resin) with specific functional groups to create a composite photosensitive composition. This composite structure enables simultaneous achievement of excellent patterning properties through photoacid generator interaction and superior insulation properties through the cured film's molecular structure, resolving the contradiction between patterning performance and insulation reliability

Inventive Principle:
Principle #40Composite materials

2Duration of action of stationary object

If polysiloxane compounds are used for curable photosensitive compositions, then curability is improved, but insulation properties of cured products are still insufficient

Engineering Contradiction:
ImprovecurabilityVSAvoidinsulation properties
Core Design Contradiction:
Duration of action of stationary objectVSReliability

Solution Approach 1:

The curable compound in the patent is designed with multi-functionality: it contains polymerizable unsaturated bonds for curability, specific functional groups for durability, and molecular structure features for insulation properties. This universal compound performs multiple functions simultaneously, resolving the contradiction between achieving curability and maintaining insulation performance

Inventive Principle:
Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The composition exhibits excellent patterning properties and electrical insulation reliability when cured, suitable for use in thin film transistors as gate insulators or passivation films, enhancing transistor performance and reliability.

Implementation Method 1

a positive photosensitive composition... comprises a compound (A) that contains an alkenyl group or a SiH group within a molecule and has a structure that decomposes in the presence of acid to generate an acidic group or a hydroxyl group; (D) a photoacid generator

Methodology Applied
Scientific EffectPhotoacid generation: Photodissociation

Implementation Method 2

a compound (B) that contains a SiH group or an alkenyl group within a molecule; (C) a hydrosilylation catalyst

Methodology Applied
Scientific EffectHydrosilylation: Chemical Bonding

Data Source

PatentEP3528046B1Positive photosensitive composition and thin film transistor
Publication Date: 2020.09.09 KANEKA CORP
  • EP3528046B1 patent drawingFigure 1~2
  • EP3528046B1 patent drawing
  • EP3528046B1 patent drawing

AI summary

The present invention aims to provide positive photosensitive compositions that have excellent patterning properties and can exhibit excellent electrical insulation reliability when cured (as thin films). The positive photosensitive composition according to the present invention is characterized by including (G) a compound having a structure represented by formula (X1) or (X2); (H) a compound having a structure that decomposes in the presence of acid to generate an acidic group or a hydroxyl group; and (D) a photoacid generator, the formulas (X1) and (X2) respectively being: