Photosensitive IC Reflective Layer Quantum Efficacy

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

The existing production methods for photosensitive microchips, particularly those using photodiodes, suffer from reduced quantum efficacy due to unabsorbed photons being lost as they are either reflected or refracted into intermetallic levels of the integrated circuit, rather than being absorbed and converted into electron-hole pairs.

Innovation Solution

A reflective layer, made from materials like titanium oxide, aluminum oxide, or magnesium oxide, is introduced between the passivation layer and the amorphous silicon layers to reflect unabsorbed photons back into the amorphous silicon, enhancing the creation of electron-hole pairs and improving quantum efficacy.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If photons are incident on the lower electrode or intermetallic levels, then the photons are reflected or refracted, but the quantum efficacy is reduced due to loss of unabsorbed photons

Engineering Contradiction:
Improvequantum efficacyVSAvoidstructure complexity
Core Design Contradiction:
Loss of energyVSDevice complexity

Solution Approach 1:

The patent applies this principle by converting the harmful reflection and refraction of photons at the lower electrode and intermetallic levels into a beneficial effect. Instead of allowing photons to be lost, the reflective layer captures these reflected photons and redirects them back through the amorphous silicon layers, transforming the harmful photon loss into additional opportunities for electron-hole pair generation and improving quantum efficacy

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

Solution Approach 2:

The patent implements this principle by nesting the reflective layer within the existing integrated circuit structure, specifically positioning it between the passivation layer and the amorphous silicon layers. This nested configuration allows the reflective layer to be integrated without significantly increasing overall device complexity while still providing the beneficial photon redirection effect

Inventive Principle:
Principle #7Nested doll (Nesting)

2Productivity

If a reflective layer is added to improve quantum efficacy, then unabsorbed photons are reflected back and can generate additional electron-hole pairs, but the device complexity increases

Engineering Contradiction:
Improvequantum efficacyVSAvoidnumber of layers
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The reflective layer serves multiple functions within the photodiode structure: it reflects unabsorbed photons back into the amorphous silicon layers to generate additional electron-hole pairs, it can be positioned to optimize optical path length, and it integrates with the existing passivation and electrode structures. This multi-functionality justifies the addition of the layer by providing multiple benefits beyond simple photon reflection

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

The patent applies this principle by changing the optical parameters of the photodiode structure through the addition of the reflective layer. The reflective layer modifies the optical path, increasing the effective absorption length and changing the distribution of photon absorption throughout the amorphous silicon layers, thereby improving quantum efficacy without requiring fundamental redesign of the device

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The reflective layer increases the quantum efficacy of the photodiode by allowing unabsorbed photons to generate additional electron-hole pairs, thereby enhancing the performance of photosensitive integrated circuits under various illumination conditions and reducing parasitic effects from external influences.

Implementation Method 1

photons from incident electromagnetic radiation are absorbed

Methodology Applied
Scientific EffectPhoton absorption: Absorption (EM radiation)

Implementation Method 2

An electron of the silicon then goes from the valence band to the conduction band, creating an electron-hole pair

Methodology Applied
Scientific EffectPhotoelectric effect: Photoelectric Effect

Implementation Method 3

a reflective layer capable of reflecting photons not absorbed by the amorphous silicon layers

Methodology Applied
Scientific EffectReflection: Reflection

Data Source

PatentUS8610048B2Photosensitive integrated circuit equipped with a reflective layer and corresponding method of production
Publication Date: 2013.12.17 STMICROELECTRONICS FRANCE
  • US8610048B2 patent drawing
  • US8610048B2 patent drawing

AI summary

A method for producing a photosensitive integrated circuit including producing circuit control transistors, producing, above the control transistors, and between at least one upper electrode and at least one lower electrode, at least one photodiode, by amorphous silicon layers into which photons from incident electromagnetic radiation are absorbed, producing at least one passivation layer, between the lower electrode and the control transistors, and producing, between the control transistors and the external surface of the integrated circuit, a reflective layer capable of reflecting photons not absorbed by the amorphous silicon layers.