Photosensitive Resin Composition Rectangular Cross-Section Plating

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Solution Overview

Problem

The challenge lies in creating a photosensitive resin composition that can form a resist pattern film with a rectangular cross-section for fine and dense wiring and bumps, while preventing mold residue adhesion and swelling during the production of plated formed products, especially when dealing with tin-silver alloy compounds.

Innovation Solution

A photosensitive resin composition comprising a polymer with an acid dissociative group, a photoacid generator, and a solvent mixture of propylene glycol monomethyl ether acetate and 3-methoxybutyl acetate, which forms a resist pattern film with a rectangular cross-section, reducing residue adhesion and swelling during the plating process.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Shape

If a conventional photosensitive resin composition is used to form a resist pattern film for fine and dense wiring and bumps, then the resist pattern film can be formed, but it cannot maintain a rectangular cross-section due to swelling and deformation, leading to poor plating quality

Engineering Contradiction:
Improvecross-sectional shape of resist pattern filmVSAvoidprecision of plating pattern
Core Design Contradiction:
ShapeVSManufacturing precision

Solution Approach 1:

The patent modifies the chemical composition parameters of the photosensitive resin, specifically incorporating polymer (A) with acid dissociative groups and using a controlled solvent system (propylene glycol monomethyl ether acetate and 3-methoxybutyl acetate in specific ratios). These parameter changes enable the resist to maintain its rectangular cross-section during plating while achieving fine and dense wiring patterns with high manufacturing precision

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent creates a composite photosensitive resin system by combining polymer (A) with acid dissociative groups, photoacid generator (B), and a specific solvent mixture. This composite material formulation provides both the structural integrity to maintain rectangular cross-section and the photochemical properties needed for precise pattern formation in fine and dense wiring applications

Inventive Principle:
Principle #40Composite materials

2Productivity

If a resist pattern is used as a mold for plating to produce fine and dense plated formed products, then the plating can be formed, but mold residue easily adheres to the plated formed product, especially when it is a tin-silver alloy compound

Engineering Contradiction:
Improveproduction efficiency of plated formed productVSAvoidmold residue adhesion
Core Design Contradiction:
ProductivityVSObject-generated harmful factors

Solution Approach 1:

The patent changes the chemical parameters of the photosensitive resin composition, specifically using polymer (A) with acid dissociative groups and a controlled solvent system with less than 60% by mass of the specified solvent mixture. These parameter changes reduce the chemical affinity between the resist mold and tin-silver alloy plating, preventing residue adhesion while maintaining production efficiency

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent introduces polymer (A) with acid dissociative groups as an intermediary material between the resist mold and the metal substrate. This intermediary creates a controlled interface that prevents harmful adhesion of tin-silver alloy residue to the plated formed product, solving the contamination problem while maintaining productive plating processes

Inventive Principle:
Principle #24Intermediary (Mediator)

3Stability of the object's composition

If the solvent content in the photosensitive resin composition is increased to improve coating uniformity, then the resin film can be applied smoothly, but the resist pattern film swells during plating, causing deformation and loss of rectangular cross-section

Engineering Contradiction:
Improveuniformity of resin film coatingVSAvoidshape stability of resist pattern film during plating
Core Design Contradiction:
Stability of the object's compositionVSShape

Solution Approach 1:

The patent optimizes the solvent content parameter to less than 60% by mass of the specified solvent mixture (propylene glycol monomethyl ether acetate and 3-methoxybutyl acetate). This parameter change achieves a balance where sufficient solvent remains for smooth coating uniformity, while the limited solvent content prevents excessive swelling during plating, thereby maintaining the rectangular cross-section of the resist pattern film

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively forms a resist pattern film with a rectangular cross-section, suppressing residue adhesion and swelling, thereby enhancing the production of plated formed products with improved resolution and resistance to plating solutions.

Implementation Method 1

photoacid generator (B)

Methodology Applied
Scientific EffectPhotoacid generation: Photopolymerisation

Data Source

PatentUS12174538B2Photosensitive resin composition, method for producing resist pattern film, method for producing plated formed product, and method for producing tin-silver plated-formed product
Publication Date: 2024.12.24 JSR CORPORATION
  • US12174538B2 patent drawing
  • US12174538B2 patent drawing
  • US12174538B2 patent drawing

AI summary

A photosensitive resin composition contains polymer (A) having an acid dissociative group, photoacid generator (B), and solvent (C), the solvent (C) containing 80 to 95% by mass of propylene glycol monomethyl ether acetate (C1) and 5 to 18% by mass of 3-methoxybutyl acetate (C2), a content ratio of other solvent (C3) in the solvent (C) being 0 to 10% by mass, and a content ratio of the solvent (C) contained in the photosensitive resin composition being less than 60% by mass.