Physical Quantity Detection Device Electrode Segmentation for Balanced Tuning
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Solution Overview
Problem
Existing physical quantity detection devices, such as gyro sensors, face issues with inappropriate balance tuning due to unnecessary signal generation from coupled detection electrodes, leading to varying performance.
Innovation Solution
The method involves decoupling certain detection electrodes and adjusting the mass of weight portions on vibration arms to achieve balanced tuning, followed by electrical coupling of specific electrodes to enhance sensitivity and reduce noise.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If detection electrodes are electrically coupled to improve sensitivity, then detection sensitivity is improved, but balance tuning becomes difficult and performance varies
Solution Approach 1:
The detection electrodes are divided into two independent groups: first and second detection electrodes coupled together, and third and fourth detection electrodes coupled together. This segmentation allows independent balance tuning for each group while maintaining the sensitivity benefits of electrode coupling, resolving the contradiction between improved detection sensitivity and balance tuning accuracy.
2Manufacturing precision
If detection electrodes are decoupled to enable balance tuning, then balance tuning accuracy is improved, but detection sensitivity decreases
Solution Approach 1:
Rather than complete decoupling, the invention segments the detection electrodes into two independently coupled pairs. Each pair can be tuned separately for optimal balance while maintaining the signal amplification benefits of electrical coupling within each pair, thus avoiding the sensitivity loss that would result from complete decoupling.
Solution Approach 2:
The invention provides a configurable electrode coupling arrangement that can be adjusted during manufacturing and operation. This dynamic configuration allows optimization of both balance tuning and detection sensitivity based on specific application requirements, rather than being fixed in a single state.
Data Source
AI summary
A method includes preparing a vibration element, adjusting at least one of drive vibration arms, and electrically coupling a first detection electrode and a third detection electrode and electrically coupling a second detection electrode and a fourth detection electrode.