Multi-Substrate PIC Coupling for Precise Fiber Alignment

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Solution Overview

Problem

The challenge in integrating CMOS and photonic components into a single device is the difficulty in forming surface features for fiber attachment after other portions of the PIC die are fabricated, making it hard to account for the location of these features during fabrication.

Innovation Solution

A multi-substrate approach where a groove is formed in a first substrate independently of the PIC structure, aligned with a cavity in a second substrate, allowing optical fiber attachment after the substrates are coupled, using a hybrid of metallic and insulative bonding.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If surface features for fiber attachment are formed after other portions of the PIC die are fabricated, then the fiber attachment location can be determined, but it becomes difficult to account for the location of these features when fabricating certain active portions of the PIC structure

Engineering Contradiction:
Improvefiber attachment location precisionVSAvoidPIC fabrication ease
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The device is divided into two separate substrates: a first substrate for forming the groove and a second substrate for forming the PIC structure. This segmentation allows independent fabrication of each substrate without constraints, resolving the contradiction between precise fiber attachment location and ease of PIC fabrication.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The groove for fiber attachment is formed in the first substrate before coupling to the second substrate. This preliminary action ensures that the fiber attachment location is predetermined and precise, while the PIC structure can be fabricated on the second substrate without constraints.

Inventive Principle:
Principle #10Preliminary action

2Adaptability or versatility

If a multi-substrate approach is used with groove and cavity alignment, then fiber attachment flexibility is improved, but substrate coupling complexity increases

Engineering Contradiction:
Improvefiber attachment flexibilityVSAvoidsubstrate coupling complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The device is segmented into two substrates with distinct functions: the first substrate handles fiber attachment (with groove) while the second substrate handles PIC structure (with cavity). This segmentation provides flexibility in fiber attachment while keeping each substrate's design relatively simple.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The coupling interface between the two substrates acts as an intermediary that aligns the groove and cavity features. This intermediary mechanism enables flexible fiber attachment while managing the overall complexity through a standardized coupling approach.

Inventive Principle:
Principle #24Intermediary (Mediator)

Data Source

PatentUS12523831B2Multi-substrate coupling for photonic integrated circuits
Publication Date: 2026.01.13 GLOBALFOUNDRIES US INC
  • US12523831B2 patent drawing
  • US12523831B2 patent drawing
  • US12523831B2 patent drawing

AI summary

Embodiments of the disclosure provide a multi-substrate coupling for photonic integrated circuits (PICs). Structures of the disclosure may include a first substrate having a first surface. The first surface includes a groove therein. A second substrate has a second surface coupled to the first surface. The second substrate includes a cavity substantially aligned with the groove of the first surface, and a photonic integrated circuit (PIC) structure horizontally distal to the cavity.