Photonic Integrated Circuit Testing via Optical Scanning

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Solution Overview

Problem

Current testing methods for photonic integrated circuits are time-consuming and costly due to the need for precise mechanical alignment of light-guiding fibers, limiting the ability to efficiently check waveguide structures during production or afterward.

Innovation Solution

An apparatus and method that utilize a scanning device to precisely position and angle an illumination light beam onto photonic integrated circuits, eliminating the need for mechanical fiber alignment, and include a detection device for spatially resolved detection of light, allowing for quick and cost-effective examination of photonic integrated circuits.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If light-guiding fibers are aligned and positioned with respect to the photonic integrated circuit, then light coupling and detection can be achieved, but the positioning process takes a comparatively long time and is very time-consuming

Engineering Contradiction:
Improvepositioning accuracyVSAvoidtesting time
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent replaces the mechanical fiber alignment system with an optical scanning system. Instead of mechanically positioning fibers to achieve precise alignment, the invention uses a scanning device that optically couples light to the photonic integrated circuit through scanning movements, eliminating the time-consuming mechanical positioning process while maintaining positioning accuracy.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent introduces a scanning device that dynamically positions the illumination and detection beams across the photonic integrated circuit surface. This dynamic scanning approach replaces static mechanical fiber alignment, allowing rapid repositioning without physical contact, thereby reducing testing time while maintaining precision.

Inventive Principle:
Principle #15Dynamics

2Manufacturing precision

If mechanical alignment of light-guiding fibers is performed for each circuit separately, then precise light coupling is achieved, but the testing process becomes time-consuming and costly

Engineering Contradiction:
Improvealignment precisionVSAvoidtesting throughput
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The patent replaces mechanical fiber alignment with an optical scanning system that achieves precise light coupling through scanning movements. This substitution eliminates the need for separate mechanical alignment operations for each circuit, significantly improving testing throughput while maintaining alignment precision through the scanning device's controlled movements.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The scanning device serves multiple functions: it performs both illumination and detection across different locations on the photonic integrated circuit without requiring separate mechanical alignment operations. This multi-functionality enables rapid testing of multiple circuits sequentially, improving productivity while maintaining manufacturing precision through the universal scanning mechanism.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Volume of moving object

If traditional optical components are replaced by integrated optical components, then compactness is improved, but the number of available test methods remains limited

Engineering Contradiction:
Improvecomponent compactnessVSAvoidtest method variety
Core Design Contradiction:
Volume of moving objectVSAdaptability or versatility

Solution Approach 1:

The patent introduces an optical scanning system that provides versatile testing capabilities for integrated photonic circuits. Instead of being limited to traditional test methods, the scanning device enables multiple testing approaches (illumination scanning, detection scanning, spatial frequency analysis) that adapt to different circuit designs and components, thereby increasing test method variety while maintaining the compactness of integrated components.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables efficient and cost-effective testing of photonic integrated circuits by eliminating the need for mechanical fiber alignment, allowing for precise input coupling and detection of light, thereby facilitating rapid and thorough examination of waveguide structures.

Implementation Method 1

a scanning device for selecting an illumination location

Methodology Applied
Scientific EffectOptical reflection: Reflection

Implementation Method 2

steering the illumination light beam onto a photonic integrated circuit

Methodology Applied
Scientific EffectOptical refraction: Refraction

Implementation Method 3

a detection device having a detection path for detecting detection light coming from the photonic integrated circuit

Methodology Applied
Scientific EffectPhotoelectric detection: Photoelectric Effect

Data Source

PatentUS11782088B2Devices, methods and sample holder for testing photonic integrated circuits and photonic integrated circuits
Publication Date: 2023.10.10 CARL ZEISS SMT GMBH
  • US11782088B2 patent drawing
  • US11782088B2 patent drawing
  • US11782088B2 patent drawing

AI summary

Methods and apparatuses for testing a photonic integrated circuit and a corresponding sample holder and a photonic integrated circuit are provided. Here, a location for an illumination light beam can be selected by way of a scanning device, with the result that targeted coupling of the illumination light into the photonic integrated circuit is made possible.