Piezoelectric Actuator Crystallinity Control for Displacement Stability
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Solution Overview
Problem
Piezoelectric actuators experience displacement amount reduction when subjected to repeated driving, which affects the durability and performance of liquid discharge heads.
Innovation Solution
A piezoelectric actuator is designed with a ground substrate layer, an intermediate layer containing Ti and TiO2, an electrode layer with preferentially oriented Pt in the (111) direction, and a piezoelectric layer with lead zirconate titanate oriented in the (100), (001), or (110) direction, where the half width of the rocking curve in the (111) plane of the Pt electrode layer is 10° or more, enhancing crystallinity and reducing displacement reduction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Duration of action of moving object
If the piezoelectric actuator is driven repeatedly, then the liquid discharge head can maintain continuous operation, but the displacement amount reduces over time
Solution Approach 1:
The patent applies parameter changes by controlling the half width of the rocking curve in the (111) plane of the Pt electrode layer to be 10° or more, and by adjusting the surface resistance of the intermediate layer to be 3 kΩ/□ or more. These parameter specifications modify the crystalline structure and electrical properties of the layers to suppress displacement amount reduction during repeated driving, thereby maintaining reliability while enabling continuous operation.
2Manufacturing precision
If the crystallinity in each functional layer is improved, then the piezoelectric performance increases, but the displacement amount reduction in repeated driving increases
Solution Approach 1:
The patent applies parameter changes by controlling the half width of the rocking curve in the (111) plane of the Pt electrode layer to be 10° or more. This specific parameter control optimizes the crystalline structure to balance piezoelectric performance with resistance to displacement amount reduction during repeated driving.
Solution Approach 2:
The patent employs composite materials by combining multiple functional layers with specific properties: the ground substrate layer, the intermediate layer containing Ti and TiO2 with controlled surface resistance, the Pt electrode layer with controlled crystallinity, and the lead zirconate titanate piezoelectric layer. This composite structure allows simultaneous optimization of piezoelectric performance and durability against repeated driving.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively suppresses displacement amount reduction by repeated drive, thereby improving the durability and liquid discharge performance of the actuator and head.
Implementation Method 1
a piezoelectric layer containing lead zirconate titanate on the electrode layer, in which the lead zirconate titanate contained in the piezoelectric layer is preferentially oriented in the (100), (001), or (110) direction
Implementation Method 2
the half width of the rocking curve in the (111) plane of the Pt contained in the electrode layer in X-ray diffraction is 10 or more
Data Source
AI summary
A piezoelectric actuator has a ground substrate layer, an intermediate layer containing at least one of Ti and TiO2 on the ground substrate layer, an electrode layer containing Pt on the intermediate layer, and a piezoelectric layer containing lead zirconate titanate on the electrode layer, in which the lead zirconate titanate contained in the piezoelectric layer is preferentially oriented in the (100), (001), or (110) direction, the Pt contained in the electrode layer is preferentially oriented in the (111) direction, and the half width of the rocking curve in the (111) plane of the Pt contained in the electrode layer in X-ray diffraction is 1° or more.