Piezoelectric Linear Actuator Thickness Reduction via Guide Member Merging
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
In semiconductor production, there is a need to minimize gas providing systems, including valves and flow control devices, but existing laminated piezoelectric actuators are hindered by stem fixing guides and piezoelectric element support structures, preventing device miniaturization.
Innovation Solution
A piezoelectric linear actuator configuration is developed using a laminated piezoelectric actuator with a lower support member, pressing member, guide member, displacement transmission member, adjustment screw, and elastic body, which reduces the thickness by aggregating components on either side of the actuator, allowing for a maximally thin design.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If stem fixing guide and piezoelectric element support parts are arranged to surround the laminated piezoelectric actuator, then the actuator is supported and guided properly, but the device size increases and miniaturization is prevented
Solution Approach 1:
The guide member integrates multiple functions: it guides the pressing member's movement, supports the laminated piezoelectric actuator, and provides structural framework. By combining support and guidance functions into a single integrated component rather than separate surrounding parts, the device achieves proper actuator support while minimizing overall size.
Solution Approach 2:
The guide member serves multiple purposes simultaneously: it acts as a guide for the pressing member, a support structure for the piezoelectric actuator, and part of the overall device framework. This multi-functionality eliminates the need for additional dedicated support parts, enabling miniaturization while maintaining reliability.
2Volume of moving object
If the laminated piezoelectric actuator is made thinner to minimize device size, then device miniaturization is achieved, but the structural support and guidance requirements become more challenging
Solution Approach 1:
The guide member extends in the width direction (lateral dimension) rather than requiring increased thickness. By utilizing the width dimension for structural support and guidance functions, the design achieves actuator thinness in the thickness direction while maintaining necessary support through lateral extension of the guide member.
Solution Approach 2:
The guide member provides localized support and guidance precisely where needed around the thin piezoelectric actuator. Rather than requiring uniform thickening throughout the device, the structure concentrates support functions at specific locations through the laterally extending guide member, enabling thin actuator design without compromising structural integrity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables the reduction of the thickness of piezoelectrically driven valves and flow control devices, achieving a maximally thin piezoelectric linear actuator and valve design, even in width, while maintaining high precision and accuracy in flow rate control.
Implementation Method 1
a displacement transmission member which transfer a displacement of the laminated piezoelectric actuator resulting from a piezoelectric effect
Data Source
AI summary
A piezoelectric linear actuator includes a laminated piezoelectric actuator, a lower support member that supports the laminated piezoelectric actuator, a pressing member that biases the laminated piezoelectric actuator from the top thereof, a guide member connected to the lower support member to guide the pressing member; and a displacement transmission member which includes a pair of displacement transmission plates, an adjustment screw connected to the pair of displacement transmission plates, an output section connected to the pair of displacement transmission plates, and an elastic body that biases the output section downward.