Piezoelectric Element Buffer Layer Composition
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Solution Overview
Problem
Current piezoelectric elements used in inkjet printers and other devices lack high enough piezoelectric constants and density, limiting their ability to achieve higher resolution and faster printing speeds.
Innovation Solution
A piezoelectric element comprising a base substrate with a buffer layer of Pb((Zr1-xTix)1-yNby)O3 and a relaxor material piezoelectric film, where x is between 0 and 1, and y is between 0.05 and 0.3, allowing for improved orientation and denser film formation, enhancing piezoelectric characteristics.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional piezoelectric films are used, then the structure is simple and ease of manufacture is maintained, but the piezoelectric constant is insufficient and manufacturing precision is limited
Solution Approach 1:
The patent employs a composite layer structure consisting of a buffer layer (Pb(Zr1-xTix)1-yNbyO3) and a piezoelectric film layer, where the buffer layer serves as a foundation to enhance the piezoelectric properties of the subsequent film. This composite approach allows the system to achieve a high piezoelectric constant (d31 ≥ 400 pC/N) by combining materials with complementary properties, resolving the contradiction between maintaining manufacturing simplicity and improving piezoelectric performance.
Solution Approach 2:
The patent systematically varies compositional parameters (x and y values in the buffer layer formula Pb(Zr1-xTix)1-yNbyO3) to optimize piezoelectric characteristics. By controlling the Zr/Ti ratio (x) and Nb content (y) within specific ranges, the invention achieves maximum piezoelectric constant while maintaining manufacturability, demonstrating parameter optimization as a key strategy to resolve the technical contradiction.
2Productivity
If higher piezoelectric constant is achieved, then printing speed and resolution are improved, but film density and orientation control become more difficult
Solution Approach 1:
The buffer layer acts as an intermediary between the substrate and the piezoelectric film, facilitating controlled epitaxial growth and orientation of the film. This intermediate layer enables the piezoelectric film to achieve preferred crystallographic orientation ((100) or (110) planes) while maintaining high piezoelectric constant, thereby resolving the contradiction between improved printing performance and controlled film orientation.
Solution Approach 2:
The patent introduces local compositional variations within the buffer layer (specific Nb content distribution and Zr/Ti ratios) to create favorable local conditions for piezoelectric film nucleation and growth. This local quality control ensures that the film develops the desired orientation and high piezoelectric properties in specific regions, addressing the challenge of maintaining orientation control while achieving high productivity.
3Reliability
If relaxor material is used for piezoelectric film, then piezoelectric constant increases, but film formation complexity increases
Solution Approach 1:
The buffer layer is formed in advance with specific compositional characteristics (Pb(Zr1-xTix)1-yNbyO3 with controlled x and y values) to prepare the substrate surface for subsequent piezoelectric film deposition. This preliminary action creates optimal conditions for forming high-quality relaxor material films with high piezoelectric constants, simplifying the overall manufacturing process by pre-establishing the necessary structural and compositional foundation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The proposed solution results in a piezoelectric element with a high piezoelectric constant and increased deformation under voltage, enabling higher resolution and faster printing speeds in inkjet printers and other applications.
Implementation Method 1
a piezoelectric element that uses a piezoelectric film... a piezoelectric element comprising: a base substrate; a buffer layer formed above the base substrate; and a piezoelectric film formed above the buffer layer
Data Source
AI summary
A piezoelectric element includes a base substrate, a buffer layer formed above the base substrate, and a piezoelectric film formed above the buffer layer, wherein the buffer layer is formed of Pb ((Zr1-xTix)1-yNby)O3 of a perovskite type, where x is in a range of 0≦x≦1, and y is in a range of 0.05≦y≦0.3, and the piezoelectric film is formed of a relaxor material of a perovskite type.