Piezoelectric Actuator Crystal Orientation for Crack Suppression
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Solution Overview
Problem
Piezoelectric devices, such as ink jet recording heads, face issues with cracks and heat generation due to bending deformation of the piezoelectric body layer, which can damage the actuator and affect performance.
Innovation Solution
A piezoelectric device design with a substrate having recess portions and a diaphragm, where the piezoelectric actuator's piezoelectric body layer has different crystal orientations in specific areas to control strain and heat generation, with a (100) plane preferential orientation in one area and a lower orientation ratio in another, using an orientation control layer to manage crystal orientation and reduce stress.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If the piezoelectric actuator extends to the outside of the pressure chamber, then the bending deformation is suppressed, but cracks occur in the piezoelectric body layer
Solution Approach 1:
The patent applies local quality by creating different crystal orientations in different regions of the piezoelectric body layer. The first region (above the electrode pattern) has a different crystal orientation than the second region (outside the electrode pattern), allowing each region to have optimized properties for its specific function while working together as a whole.
2Strength
If the piezoelectric body layer extends to the outside of the pressure chamber, then the bending deformation is suppressed, but heat is generated due to current flowing
Solution Approach 1:
The patent creates local quality differences in crystal orientation between the first region (with higher (100) plane orientation ratio) and the second region (with lower (100) plane orientation ratio), allowing the first region to generate less heat while the second region maintains structural integrity.
3Power
If the piezoelectric body layer has high performance, then the electromechanical conversion is improved, but heat generated increases and may damage the actuator
Solution Approach 1:
The patent changes the crystal orientation parameters of the piezoelectric body layer by controlling the thickness of the orientation control layer in different regions. This parameter change allows optimization of the balance between electromechanical conversion performance and heat generation characteristics.
4Reliability
If the width of the first electrode layer is narrowed outside the pressure chamber, then cracks are suppressed, but the piezoelectric actuator cannot bend and deform properly
Solution Approach 1:
The patent applies local quality by creating different crystal orientations in different regions of the piezoelectric body layer. The first region (above the electrode pattern) has a different crystal orientation than the second region (outside the electrode pattern), allowing each region to have optimized properties for its specific function while working together as a whole.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively suppresses heat generation and deformation inhibition in the piezoelectric actuator, reducing the likelihood of cracks and enhancing the device's performance and reliability.
Implementation Method 1
a piezoelectric actuator having a first electrode, a piezoelectric body layer, and a second electrode which are stacked in a first direction
Data Source
AI summary
A piezoelectric body layer of a first area has (100) plane preferential orientation, and a (100) plane orientation ratio of the piezoelectric body layer of a second area is lower than a (100) plane orientation ratio of the piezoelectric body layer of the first area, when one area far from an end portion of a second electrode is the first area, and one area near the end portion of the second electrode is the second area, of two areas of the second electrode in a second direction intersecting a first direction.