Piezoelectric Inertial Drive Stage High-Stiffness Flexure
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Solution Overview
Problem
Existing piezoelectric inertial drive stages face limitations in displacement range and performance due to low stiffness in flexure portions, which restricts traveling speed and axial force, making them less competitive in the market.
Innovation Solution
A compact piezoelectric inertial drive stage design featuring a high-stiffness flexure portion with parallel connection rods and adjustable slot and rod dimensions, enhancing the transfer of motion from the piezoelectric element to the friction portion for improved speed and force output.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If a low-stiffness flexure portion is used, then the device achieves easier motion transfer, but the traveling speed and axial force are limited
Solution Approach 1:
The patent applies parameter changes by optimizing the flexure portion's geometric parameters (rod dimensions, slot dimensions, spacing) to achieve high stiffness. The connection rods are designed with specific width and length ratios, and slots are positioned at optimized intervals, transforming the flexure portion from a low-stiffness to a high-stiffness structure that enables both high traveling speed and high axial force output
2Force
If the flexure portion stiffness is increased, then the axial force and response speed improve, but the motion transfer efficiency may be reduced
Solution Approach 1:
The patent applies local quality by creating non-uniform distribution of stiffness throughout the flexure portion. The connection rods have varying dimensions along their length, with thicker sections at critical load-bearing locations and thinner sections where flexibility is needed. This localized variation in quality optimizes both force transmission and motion transfer efficiency
3Volume of moving object
If a compact design is implemented, then the device size is reduced, but the structural complexity of the flexure portion increases
Solution Approach 1:
The patent applies segmentation by dividing the flexure portion into discrete connection rods separated by slots. This segmented structure achieves compact dimensions while managing complexity through modular design - each rod can be independently optimized, and the repeated pattern of rods and slots creates a scalable structure that balances compactness with manufacturability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design achieves traveling speeds of up to 100 mm/s and 10N axial pushing force, surpassing commercial products, making it more competitive and attractive in the market by enabling fast response and high-frequency operation.
Implementation Method 1
Based on inverse piezoelectric effect, piezoelectric actuators or motors could transfer electrical field into mechanical strain or movement
Implementation Method 2
a flexure portion with a first end connected to the mounting portion and a second end connected to the friction portion
Implementation Method 3
a friction portion configured to engage with the slider; the movement portion transferring a motion of the piezoelectric element to the friction portion to drive the slider
Implementation Method 4
The slider could achieve a small movement in a cycle of the driving of the piezoelectric element due to the inertia of the masses of the components involved
Data Source
AI summary
Disclosed is a piezoelectric inertial drive stage including a piezoelectric inertial driver, a slider and a holder. The driver includes a mounting portion for the mounting on the holder, a friction portion coupling to the slider, a flexure portion between the mounting portion and friction portion, a piezoelectric element with a first end bonded to the mounting portion and a second end bonded to a movement portion, the movement portion transferring the motion of the piezoelectric element to the friction portion to drive the slider.