Piezo Actuator Drive Circuit Regenerates Discharge Energy

Solution Overview

Problem

Existing fluid control valves with piezo actuators generate excessive heat and waste energy due to rapid gas supply and stop cycles, affecting flow rate control characteristics in applications like semiconductor manufacturing.

Innovation Solution

The fluid control valve incorporates a flyback transformer, charge and discharge switches, and a regenerative capacitor to recover and reuse electric energy, reducing heat generation and energy consumption by preventing energy dissipation as heat during piezo actuator discharge, and using stored energy for recharging.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the piezo actuator is driven at high speed for rapid gas supply and stop, then the responsiveness and productivity are improved, but the heat generation and energy waste increase

Engineering Contradiction:

Improvegas supply and stop speedVSAvoidenergy waste

Core Design Contradiction:

ProductivityVSLoss of energy

Solution Approach 1:

The patent converts the harmful heat energy generated during piezo actuator discharge into beneficial stored electrical energy. The discharge switch connects the piezo actuator to the flyback transformer, which converts the discharge energy into stored electrical energy in the regenerative capacitor, transforming waste heat into reusable energy that can power subsequent actuator operations.

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

Solution Approach 2:

The patent recovers the electrical energy that would otherwise be discarded as heat during piezo actuator discharge. By using the flyback transformer and regenerative capacitor, the system captures and stores the discharge energy, then reuses it for subsequent charging cycles, eliminating continuous energy waste.

Inventive Principle:

Principle #34Discarding and recovering

2Speed

If the piezo actuator is driven at high speed for rapid gas supply and stop, then the responsiveness is improved, but the heat generation affects flow rate control characteristics

Engineering Contradiction:

Improvegas supply and stop speedVSAvoidheat generation

Core Design Contradiction:

SpeedVSTemperature

Solution Approach 1:

The patent converts the harmful heat energy generated during piezo actuator discharge into beneficial stored electrical energy. The discharge switch connects the piezo actuator to the flyback transformer, which converts the discharge energy into stored electrical energy in the regenerative capacitor, transforming waste heat into reusable energy that can power subsequent actuator operations.

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

3Reliability

If conventional resistors are used to discharge piezo actuator charges, then the discharge function is achieved, but energy is consumed as heat

Engineering Contradiction:

Improvedischarge functionVSAvoidenergy consumption

Core Design Contradiction:

ReliabilityVSLoss of energy

Solution Approach 1:

The patent converts the harmful heat energy generated during piezo actuator discharge into beneficial stored electrical energy. The discharge switch connects the piezo actuator to the flyback transformer, which converts the discharge energy into stored electrical energy in the regenerative capacitor, transforming waste heat into reusable energy that can power subsequent actuator operations.

Inventive Principle:

Principle #22Blessing in disguise (Convert harm into benefit)

Solution Approach 2:

The patent recovers the electrical energy that would otherwise be discarded as heat during piezo actuator discharge. By using the flyback transformer and regenerative capacitor, the system captures and stores the discharge energy, then reuses it for subsequent charging cycles, eliminating continuous energy waste.

Inventive Principle:

Principle #34Discarding and recovering

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration effectively suppresses heat generation and reduces energy consumption, improving the responsiveness and control characteristics of the fluid control valve by regenerating and reusing electric energy.

Implementation Method 1

a piezo actuator (31) that displaces the valve body (33)

Methodology Applied

Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

a flyback transformer (5) including a primary side coil (51) connected to a DC power supply (DV) and a secondary side coil (52) connected to the piezo actuator (31)

Methodology Applied

Scientific EffectElectromagnetic induction: Electromagnetic Induction

Data Source

PatentUS11162602B2Fluid control valve, flow rate control device, and drive circuit

Publication Date: 2021.11.02 HORIBA STEC CO LTD

AI summary

A fluid control valve can suppress heat generation when discharging charges from a piezo actuator for contraction and reduce energy necessary to drive the piezo actuator. The fluid control valve includes a piezo actuator and a drive circuit connected to the piezo actuator is adapted so that the drive circuit includes: a flyback transformer including a primary side coil connected to a DC power supply DV and a secondary side coil connected to the piezo actuator; a charge switch that is connected to the primary side coil and switched from on to off when the piezo actuator charges; a discharge switch that is connected to the secondary side coil and switched from off to on when the piezo actuator discharges; and a regenerative capacitor that is connected to the primary side coil and into which electric energy due to the discharge of the piezo actuator is regenerated.