Piezoelectric Element Crystal Orientation for Inkjet Head Deflection
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Solution Overview
Problem
The challenge in liquid ejecting heads, such as ink jet recording heads, is achieving sufficient piezoelectric properties in densely arranged piezoelectric elements, where size reduction compromises necessary deflection capabilities, requiring a piezoelectric element that can achieve greater deformation with a relatively small drive voltage.
Innovation Solution
A liquid ejecting head with a piezoelectric element featuring a first electrode preferentially oriented along the (111) plane, with a sum of (111) and (200) planes relative to (111), (200), and (220) planes being 20% or less, ensuring uniform crystal alignment and enhanced piezoelectric properties, utilizing materials like platinum, iridium, or palladium, and incorporating a titanium or titanium oxide layer to improve orientation and deflection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If piezoelectric elements are densely arranged to improve printing quality, then printing quality is improved, but the size of each piezoelectric element is reduced which compromises necessary deflection capabilities
Solution Approach 1:
The patent changes the crystal orientation parameters of the first electrode, specifically controlling the abundance ratio of (111) and (200) planes to be 20% or less relative to the sum of (111), (200), and (220) planes. This parameter change enables the piezoelectric element to achieve greater deflection with smaller size, resolving the contradiction between dense arrangement and sufficient deflection capability
Solution Approach 2:
The patent uses a composite structure consisting of a first electrode with controlled crystal orientation, a piezoelectric layer, and a second electrode. The specific composition and orientation control of the first electrode material creates a composite system that maximizes piezoelectric effect and deflection efficiency, allowing small-sized elements to achieve necessary deflection for high-quality printing
2Productivity
If the size of piezoelectric element is reduced to enable dense arrangement, then device density is improved, but piezoelectric properties deteriorate due to insufficient deflection
Solution Approach 1:
By controlling the crystal orientation parameters of the first electrode, specifically the abundance ratio of (111) and (200) planes, the patent enhances the piezoelectric properties of small-sized elements. This parameter optimization ensures that even reduced-size elements maintain reliable piezoelectric performance necessary for dense arrangement
Solution Approach 2:
The patent applies local quality enhancement by specifically orienting the crystals of the first electrode in a preferred direction with controlled abundance ratios. This localized crystal orientation control ensures that each small piezoelectric element maintains high piezoelectric properties, enabling reliable performance in densely arranged configurations
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration results in improved piezoelectric properties and discharge performance by ensuring uniform crystal alignment and increased deflection, stabilizing the discharge properties of the liquid ejecting head.
Implementation Method 1
a piezoelectric element that includes a first electrode, a piezoelectric layer, and a second electrode and causes changes in the pressure in pressure-generating chambers communicating with nozzle orifices
Implementation Method 2
The first electrode is preferentially oriented along the (111) plane in a direction parallel to the film surface and, in a direction perpendicular to the film surface, the sum of the (111) and (200) planes relative to the sum of the (111), (200), and (220) planes is 20% or less in terms of the abundance ratio
Data Source
AI summary
A piezoelectric element has a first electrode, a piezoelectric layer, and a second electrode. The first electrode is preferentially oriented along the (111) plane in the direction parallel to the film surface and, in the direction perpendicular to the film surface, the sum of the (111) and (200) planes relative to the sum of the (111), (200), and (220) planes is 20% or less in terms of the abundance ratio.