Piezoelectric Element High Young's Modulus Diaphragm Deformation
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Solution Overview
Problem
Piezoelectric elements with soft piezoelectric layers having small Young's modulus suffer from deformation under stress from upper electrodes, leading to reduced displacement efficiency and linearity, especially at high driving voltages.
Innovation Solution
A piezoelectric element with a potassium, sodium, and niobium-based piezoelectric layer, where the Young's modulus exceeds 130 GPa, is used, featuring a first electrode, a piezoelectric layer, and a second electrode, which helps in reducing deformation and maintaining efficiency at high voltages.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If a soft piezoelectric layer with small Young's modulus is used, then environmental loading is reduced by using non-lead-based material, but the piezoelectric layer deforms under stress from the upper electrode, causing initial deflection of the diaphragm and reducing displacement efficiency
Solution Approach 1:
The patent changes the physical parameter of the piezoelectric layer by increasing its Young's modulus to 75 GPa or more through material composition optimization (PZT layer with specific Pb(Zr,Ti)O3 ratios), thereby resolving the contradiction between using softer non-lead materials and maintaining sufficient mechanical stiffness to prevent deformation under electrode stress
Solution Approach 2:
The patent employs composite material design by combining the piezoelectric layer with a support layer having higher Young's modulus (150 GPa or more), creating a composite structure that provides both the desired piezoelectric properties and sufficient mechanical strength to maintain diaphragm flatness and displacement efficiency
2Ease of manufacture
If a piezoelectric layer with small Young's modulus is used, then the material is more flexible and easier to deposit, but the piezoelectric layer cannot sufficiently bend the diaphragm when driven at high voltage, reducing linearity
Solution Approach 1:
The patent optimizes the Young's modulus parameter to a specific range (75-150 GPa) that balances manufacturability with performance, ensuring the layer is stiff enough to maintain linearity at high voltages while remaining compatible with standard deposition processes
Solution Approach 2:
The patent applies preliminary reinforcement by adding a support layer with high Young's modulus before the piezoelectric layer deposition, pre-establishing the mechanical framework that enables high-voltage operation with maintained linearity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The increased Young's modulus of the piezoelectric layer effectively reduces deformation and maintains the displacement efficiency and linearity of the diaphragm even at high driving voltages, enhancing the overall performance of the piezoelectric element.
Implementation Method 1
a piezoelectric layer (PZT layer) containing lead, zirconium, and titanium
Data Source
AI summary
A piezoelectric element according to the present disclosure includes: a first electrode; a piezoelectric layer formed at an upper part of the first electrode; and a second electrode formed at an upper part of the piezoelectric layer, in which the piezoelectric layer contains potassium, sodium, and niobium, and a Young's modulus of the piezoelectric layer measured by a nanoindentation method exceeds 130 GPa.