Piezoelectric Element Voltage Control for EUV Chamber Pressure
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Solution Overview
Problem
The existing extreme ultraviolet light generating apparatuses face challenges in maintaining the integrity of piezoelectric elements due to pressure fluctuations within the chamber, leading to potential breakdowns when operating within specific pressure ranges, particularly during vacuum conditions.
Innovation Solution
Incorporating a pressure sensor and control unit to determine whether to apply a voltage to a piezoelectric element based on chamber pressure, thereby preventing voltage application during prohibited pressure ranges and ensuring safe operation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If voltage is applied to piezoelectric element during vacuum conditions, then piezoelectric element can be damaged due to breakdown
Solution Approach 1:
The control unit determines whether to apply voltage to the piezoelectric element based on pressure information obtained in advance from the pressure sensor. This preliminary assessment prevents voltage application during prohibited pressure ranges before damage can occur.
Solution Approach 2:
The pressure sensor continuously monitors chamber pressure and provides feedback to the control unit. The control unit uses this real-time pressure information to dynamically control voltage application to the piezoelectric element, ensuring safe operation across varying pressure conditions.
2Reliability
If pressure monitoring and control system is added, then piezoelectric element protection is improved, but apparatus complexity increases
Solution Approach 1:
The control unit performs multiple functions: it controls voltage application to the piezoelectric element, monitors pressure information, and makes protection decisions based on pressure ranges. This multi-functionality reduces the need for separate dedicated protection components.
Solution Approach 2:
The pressure sensor and control unit work together to automatically monitor and protect the piezoelectric element without requiring external intervention. The system self-regulates voltage application based on real-time pressure conditions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents damage to piezoelectric actuators by avoiding voltage application during critical pressure ranges, ensuring reliable operation during both normal and maintenance processes.
Implementation Method 1
a piezoelectric element provided in the chamber; a control unit configured to control application of a voltage to the piezoelectric element
Implementation Method 2
a pressure sensor configured to detect pressure in the chamber
Implementation Method 3
irradiating a target substance supplied into a chamber with a laser beam introduced into the chamber to generate plasma
Implementation Method 4
generate plasma from which extreme ultraviolet light is generated
Implementation Method 5
a synchrotron radiation (SR) apparatus using synchrotron radiation light
Implementation Method 6
a discharge produced plasma (DPP) apparatus using plasma generated by electric discharge
Data Source
AI summary
An extreme ultraviolet light generating apparatus for generating extreme ultraviolet light in a chamber according to one aspect of the present disclosure includes a piezoelectric element provided in the chamber; a pressure sensor configured to detect pressure in the chamber; a gas introducing unit configured to introduce gas into the chamber; an exhaust unit configured to exhaust the gas from the chamber; and a control unit configured to control application of a voltage to the piezoelectric element. The control unit is configured to determine whether or not to apply a voltage to the piezoelectric element based on information on the pressure in the chamber obtained by the pressure sensor.