Piezo Actuated Fabry-Perot Interferometer Assembly
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Solution Overview
Problem
Traditional Fabry-Perot etalons and detectors for spectrum measurements are expensive, making them unsuitable for low-cost measurement instruments, limiting their use in cost-effective applications.
Innovation Solution
A tunable optical filter system comprising a substrate with piezos, a bottom mirror, and a top mirror, where the piezos adjust the distance between the mirrors to achieve fine spectral resolution, enabling low-cost production and efficient spectral measurement using a Fabry-Perot interferometer with a broadband source and detector.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If traditional Fabry-Perot etalons and detectors are used for spectrum measurements, then measurement precision is improved, but manufacturing cost increases
Solution Approach 1:
The patent segments the Fabry-Perot etalon into separate mirror components that can be manufactured independently using standard integrated circuit processes. The mirrors are fabricated on separate wafers and then assembled, allowing for high-volume production and cost reduction while maintaining spectral measurement precision through controlled mirror spacing and alignment.
2Productivity
If high-volume integrated circuit processes are used for manufacturing, then productivity is improved, but manufacturing precision may worsen
Solution Approach 1:
The patent introduces intermediary components including alignment marks, spacer structures, and bonding interfaces that facilitate precise mirror alignment during assembly. These intermediaries enable high-volume manufacturing through automated processes while maintaining the required manufacturing precision for spectral measurements through standardized alignment protocols.
3Adaptability or versatility
If the distance between mirrors is adjusted for spectral tuning, then adaptability is improved, but device complexity increases
Solution Approach 1:
The patent replaces complex mechanical adjustment mechanisms with piezoelectric actuators that provide precise control of mirror spacing through electrical signals. This substitution maintains spectral tuning adaptability while reducing mechanical complexity, enabling electronic control of the Fabry-Perot interferometer for wide-range spectral measurements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system allows for cost-effective, wide-range spectral measurements by tuning the Fabry-Perot interferometer's optical filter, providing efficient spectral resolution and reducing production costs through high-volume integrated circuit processes and efficient mirror placement.
Implementation Method 1
one or more piezos, wherein the one or more piezos are placed on the substrate
Implementation Method 2
Fabry-Perot etalons are used for filtering light
Data Source
AI summary
A device for tunable optical filter includes a substrate, one or more piezos, a bottom mirror, and a top mirror. The one or more piezos are placed on the substrate. The one or more piezos have a piezo thickness. The bottom mirror is placed on the substrate. The bottom mirror has a bottom mirror thickness greater than the piezo thickness. The top mirror is placed on the bottom mirror. The top mirror is attached to the one or more piezos.