Piezoelectric Fluid Control Device with Deformable Substrate Gap

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Solution Overview

Problem

Conventional fluid control devices with rigid flat-plate structures face challenges in precisely aligning components to maintain a specified gap, leading to reduced fluid transportation efficiency and noise generation, especially as components miniaturize.

Innovation Solution

A fluid control device featuring a deformable substrate with a flexible plate and a communication plate that synchronously deforms with the piezoelectric actuator's vibration plate, maintaining a specified depth and reducing assembling errors and noise.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Stability of the object's composition

If rigid flat-plate structures are used for substrate and piezoelectric actuator, then structural stability is maintained, but assembly precision and gap consistency deteriorate

Engineering Contradiction:
Improvestructural stabilityVSAvoidassembly precision
Core Design Contradiction:
Stability of the object's compositionVSManufacturing precision

Solution Approach 1:

The substrate is designed with a deformable region that can dynamically change its shape during assembly. When the piezoelectric actuator is pressed against the substrate, the deformable region elastically deforms to accommodate the actuator, automatically maintaining the specified gap depth despite manufacturing tolerances. This dynamic adaptation resolves the contradiction between structural stability and assembly precision.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The substrate's rigidity parameter is changed spatially: the first region maintains high rigidity for structural support, while the second region (deformable region) has reduced rigidity to enable gap adjustment. This parameter change allows the substrate to provide both structural stability and assembly precision through controlled deformation.

Inventive Principle:
Principle #35Parameter changes

2Manufacturing precision

If the gap depth is increased to accommodate assembly variations, then assembly tolerance is improved, but fluid transportation efficiency deteriorates

Engineering Contradiction:
Improveassembly toleranceVSAvoidfluid transportation efficiency
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The deformable region enables the gap depth to be dynamically adjusted during assembly. The substrate deforms elastically to maintain the specified gap depth even when assembly variations occur, preventing gap enlargement. This ensures both assembly tolerance and fluid transportation efficiency are maintained simultaneously.

Inventive Principle:
Principle #15Dynamics

3Productivity

If the gap depth is decreased to improve fluid transportation, then productivity is improved, but the risk of contact between components increases causing noise

Engineering Contradiction:
Improvefluid transportation efficiencyVSAvoidnoise and component contact
Core Design Contradiction:
ProductivityVSObject-affected harmful factors

Solution Approach 1:

The deformable region acts as a dynamic buffer that maintains the specified gap depth, preventing both excessive gap enlargement and component contact. The elastic deformation capability ensures the gap remains within the optimal range for fluid transportation while preventing noise-causing contact between the piezoelectric actuator and substrate.

Inventive Principle:
Principle #15Dynamics

4Volume of moving object

If miniature components are adopted for device miniaturization, then device size is reduced, but assembly precision and gap maintenance become more difficult

Engineering Contradiction:
Improvedevice sizeVSAvoidassembly precision
Core Design Contradiction:
Volume of moving objectVSManufacturing precision

Solution Approach 1:

The deformable region provides a self-adjusting mechanism that compensates for assembly variations in miniature components. The elastic deformation capability allows the substrate to adapt to small misalignments inherent in miniaturized assemblies, maintaining gap consistency without requiring ultra-precise assembly processes.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The substrate's rigidity parameter is modified in the deformable region to enable gap adjustment. This parameter change allows miniature components to be assembled with standard tolerances while still achieving precise gap maintenance through controlled elastic deformation during actuator pressing.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enhances fluid transfer efficiency and reduces noise by maintaining a consistent gap between the flexible substrate and the piezoelectric actuator, improving the overall performance of the device.

Implementation Method 1

The piezoelectric element is subjected to deformation in response to an applied voltage. The vibration plate is subjected to a curvy vibration in response to the deformation of the piezoelectric element.

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

The deformable substrate is subjected to synchronous deformation. Consequently, a synchronously-deformed structure is formed on the deformable substrate and defined by the flexible plate and the communication plate collaboratively.

Methodology Applied
Scientific EffectElastic deformation: Elasticity

Data Source

PatentUS10788028B2Fluid control device with alignment features on the flexible plate and communication plate
Publication Date: 2020.09.29 MICROJET TECH
  • US10788028B2 patent drawing
  • US10788028B2 patent drawing
  • US10788028B2 patent drawing

AI summary

A fluid control device includes a piezoelectric actuator and a deformable substrate. The piezoelectric actuator includes a piezoelectric element and a vibration plate. The piezoelectric element is attached on a first surface of the vibration plate. The piezoelectric element is subjected to deformation in response to an applied voltage. The vibration plate is subjected to a curvy vibration in response to the deformation of the piezoelectric element. A bulge is formed on a second surface of the vibration plate. The deformable substrate includes a flexible plate and a communication plate, which are stacked on each other. Consequently, a synchronously-deformed structure is defined by the flexible plate and the communication plate collaboratively, and there is a specified depth maintained between the flexible plate and the bulge of the vibration plate. The flexible plate includes a movable part corresponding to the bulge of the vibration plate.