Piezoelectric Fluid Control Device with Deformable Substrate

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Conventional fluid control devices with flat-plate structures face challenges in precisely aligning the piezoelectric actuator and substrate to maintain a specified gap, leading to reduced fluid transportation efficiency and noise due to assembling errors, especially in miniaturized components.

Innovation Solution

A fluid control device with a deformable substrate and piezoelectric actuator, where the substrate features a flexible plate and communication plate that deform synchronously to maintain a specified depth between the flexible plate and the vibration plate of the actuator, reducing alignment errors and enhancing fluid transfer efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Stability of the object's composition

If flat-plate structures with certain rigidities are used for the piezoelectric actuator and substrate, then the structural stability is improved, but the alignment precision deteriorates

Engineering Contradiction:
Improvestructural stabilityVSAvoidalignment precision
Core Design Contradiction:
Stability of the object's compositionVSManufacturing precision

Solution Approach 1:

The substrate is designed with a deformable region that can dynamically change its shape from a flat plate to an arc shape. This dynamic transformation allows the substrate to adapt to the piezoelectric actuator's deformation, maintaining the specified gap depth throughout the actuation cycle while preserving the overall structural stability of the flat-plate configuration.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The substrate's physical state is changed from a rigid flat plate to a deformable structure with a specific arc shape. This parameter change in the substrate's geometric configuration enables it to compensate for alignment errors and maintain the specified gap depth between the actuator and substrate surfaces during operation.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If the gap depth is increased to prevent contact interference, then the reliability is improved, but the fluid transportation efficiency deteriorates

Engineering Contradiction:
Improvecontact interference preventionVSAvoidfluid transportation efficiency
Core Design Contradiction:
ReliabilityVSProductivity

Solution Approach 1:

The deformable substrate dynamically adjusts its shape to maintain a consistent specified gap depth between the vibration plate and substrate surfaces during actuation. This dynamic adjustment ensures reliable operation by preventing contact interference while maintaining optimal fluid transportation efficiency through consistent gap geometry.

Inventive Principle:
Principle #15Dynamics

3Volume of moving object

If miniature components are adopted for device miniaturization, then the device size is reduced, but the alignment difficulty increases

Engineering Contradiction:
Improvedevice sizeVSAvoidalignment difficulty
Core Design Contradiction:
Volume of moving objectVSManufacturing precision

Solution Approach 1:

The deformable substrate with its arc-shaped deformation capability provides a self-aligning mechanism that compensates for alignment difficulties in miniaturized devices. The dynamic shape change allows the substrate to adapt to slight misalignments, making it easier to assemble miniature components while maintaining the specified gap depth.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

By changing the substrate's geometric parameters from a fixed flat plate to a deformable structure with specific arc shape characteristics, the design enables easier alignment in miniaturized devices. The deformable region absorbs alignment tolerances, reducing the precision requirements for assembling miniature components.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The deformable substrate's synchronously-deformed structure allows for precise maintenance of the specified gap, improving fluid transfer efficiency and reducing noise, making the device more user-friendly and effective in miniaturized applications.

Implementation Method 1

The piezoelectric element is subjected to deformation in response to an applied voltage. The vibration plate is subjected to a curvy vibration in response to the deformation of the piezoelectric element.

Methodology Applied
Scientific EffectPiezoelectric effect: Piezoelectric Effect

Implementation Method 2

The flexible plate is stacked and coupled with the communication plate, and then the deformable substrate is subjected to synchronous deformation. The synchronously-deformed structure of the deformable substrate is bent in the direction away from the vibration plate.

Methodology Applied
Scientific EffectElastic deformation: Elasticity

Data Source

PatentEP3290706B1Fluid control device
Publication Date: 2021.03.24 MICROJET TECH
  • EP3290706B1 patent drawingFigure 1A
  • EP3290706B1 patent drawingFigure 1B
  • EP3290706B1 patent drawingFigure 2A

AI summary

A fluid control device (2) includes a piezoelectric actuator (23) and a deformable substrate (20). The piezoelectric actuator (23) includes a piezoelectric element (233) and a vibration plate (230). The piezoelectric element (233) is attached on a first surface (230b) of the vibration plate (230) and is subjected to deformation in response to an applied voltage. The vibration plate (230) is subjected to a curvy vibration in response to the deformation of the piezoelectric element (233). A bulge (230c) is formed on a second surface (230c) of the vibration plate (230). The deformable substrate (20) includes a flexible plate (22) and a communication plate (21) stacked on each other. A synchronously-deformed structure is defined by the flexible plate (22) and the communication plate (21). The deformable substrate (20) is bent in the direction away from the vibration plate (230). There is a specified depth (δ) maintained between the flexible plate (22) and the bulge (230c) of the vibration plate (230). The flexible plate (22) includes a movable part (22a) corresponding to the bulge (230c) of vibration plate (230).