Piezoelectric Sample Manipulator with Fluid Bearings
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Solution Overview
Problem
Conventional high-precision tomography and materials testing systems face limitations in sample positioning and loading precision, with resolutions typically only reaching the micron level, which is insufficient for advanced imaging and testing requirements.
Innovation Solution
A sample manipulator system incorporating a drive system with flexure plates and piezoelectric actuators, utilizing fluid bearings and dual drive pulleys for precise rotational and axial motion, enabling sub-micron control and dynamic loading capabilities.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional fixed detector systems with rotating stages are used, then sample positioning and movement control can be achieved, but the measurement resolution is limited to micron level
Solution Approach 1:
The patent replaces conventional mechanical positioning systems with piezoelectric actuators that utilize piezoelectric effect for direct positional control. The piezoelectric actuators convert electrical signals directly into precise mechanical displacement, eliminating the need for complex mechanical transmission components and achieving sub-micron resolution (tens of nanometers) without proportionally increasing system complexity.
Solution Approach 2:
The patent employs fluid bearings to support the rotating stage, replacing conventional mechanical bearings. The fluid bearing system uses pressurized fluid (pneumatic or hydraulic) to create a non-contact support mechanism that reduces friction and mechanical wear, enabling smoother rotation and more precise angular positioning while maintaining system reliability.
2Manufacturing precision
If conventional mechanical systems are used for sample manipulation, then basic positioning is achieved, but sub-micron motion control and centering precision cannot be achieved
Solution Approach 1:
The patent substitutes conventional mechanical screw-driven positioning mechanisms with piezoelectric actuators that provide direct, contactless actuation. The piezoelectric elements expand or contract in response to applied voltage, enabling precise control of sample position and orientation with resolution in the tens of nanometers range, far exceeding conventional mechanical systems.
Solution Approach 2:
The patent utilizes the piezoelectric effect, where physical dimensions of the actuator change in response to electrical parameter changes (voltage). By controlling the electrical input parameters, the system achieves precise control over sample positioning, motion amplitude, and orientation without mechanical linkages that would limit precision.
3Measurement precision
If conventional bearing systems are used for rotation, then basic rotational movement is achieved, but angular precision and rotational smoothness are limited
Solution Approach 1:
The patent implements fluid bearing systems that use pressurized gas or liquid to create a non-contact support surface for the rotating stage. This eliminates mechanical contact and associated friction, enabling smooth rotation with minimal energy loss and significantly improved angular precision. The fluid pressure can be precisely controlled to maintain optimal bearing clearance throughout rotation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system achieves high-precision sample manipulation with sub-micron resolution, allowing for precise centering, cyclic fatigue testing, and improved angular precision, significantly surpassing conventional systems by enabling tens of nanometers off-axis precision and orders of magnitude better load control.
Implementation Method 1
piezoelectric actuators provide high-precision control of the load on the sample and allow high precision sample translation along the rotational axis
Implementation Method 2
Fluid bearings provide improved rotation of the driven pulley
Data Source
AI summary
A sample manipulator includes a drive system, a pair of flexure plates, and piezoelectric actuators. The drive system preferably includes a pair of drive pulleys on opposite sides of a driven pulley and coupled to the driven pulley by a drive belt. The sample rotates around a rotational axis with the driven pulley. The driven pulley is preferably driven by a pair of drive belts, one being located above the sample, and the other being located below the sample. Fluid bearings provide improved rotation of the driven pulley. The flexure plates are preferably monolithic with a high number of machined flex veins with the side of a tapered threaded screw being used to create the high force required to bend many flexures at the same time for sample motion and to provide fine, precise sub-micron motion control. The piezoelectric actuators provide high-precision control of the load on the sample.